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24
Aachen papers (primary topic)
51
Further papers (secondary topic)
441
Citations
24
Aachen authors
Papers per year
20
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Papers 24
Open in paper search →-
Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications2020 Microsystems & Nanoengineering article Engineering Advanced MEMS and NEMS Technologies Open access cited by 1 patent
Xuge Fan, Anderson David Smith, Stefan Wagner, Stephan Schröder, Sayedeh Shirin Afyouni Akbari, Andreas Fischer, +4 more
90citations -
Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies2024 Microsystems & Nanoengineering article Engineering Advanced MEMS and NEMS Technologies Open access
Chen Chen, Jinqiu Zhou, Hongyi Wang, Xinyue Song, Jianbing Xie, Thomas Bäck, +1 more
23citations -
Nonlinear oscillation of a microbeam due to an electric actuation—Comparison of approximate models2023 ZAMM ‐ Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik article Engineering Advanced MEMS and NEMS Technologies
Igor V. Andrianov, Jan Awrejcewicz, Steve G. Koblik, Galina A. Starushenko
6citations -
Sensor Systems for Extremely Harsh Environments2022 Journal of Microelectronics and Electronic Packaging article Engineering Advanced MEMS and NEMS Technologies Open access
Holger Kappert, Sebastian Schopferer, Nooshin Saeidi, Ralf Döring, Steffen Ziesche, Alexander M. Olowinsky, +4 more
1citations -
Corrigendum: “Reliability of piezoelectric films for MEMS” [Jpn. J. Appl. Phys. 62 , SM0802 (2023)]2024 Japanese Journal of Applied Physics erratum Engineering Advanced MEMS and NEMS Technologies Open access
Susan E. Trolier-McKinstry, Wanlin Zhu, Betul Akkopru‐Akgun, Song Won Ko, Charalampos Fragkiadakis, Peter P. Mardilovich
0citations -
Volatile and Non-Volatile Nanoelectromechancial Switches with Ruthenium-Enhanced Nano Contacts2025 International Conference on Solid-State Sensors, Actuators and Microsystems conference-paper Engineering Advanced MEMS and NEMS Technologies Open access
Simon J. Bleiker, Elliott Worsey, Mukesh Kumar Kulsreshath, Jens Bolten, Lisa Ehlert, Dinesh Pamunuwa, +1 more
0citations
Most active Aachen authors
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Max C. Lemme 16,230 citations overall8 papers
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Igor V. Andrianov 3,714 citations overall4 papers
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Joachim Knoch 8,248 citations overall3 papers
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Sebastian Lukas 239 citations overall3 papers
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Nico Rademacher 67 citations overall3 papers
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Alexander M. Olowinsky 2,036 citations overall2 papers
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Peter P. Mardilovich 1,993 citations overall2 papers
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Charalampos Fragkiadakis 116 citations overall2 papers
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Michael Gross 0 citations overall2 papers
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Thomas Bäck 22,845 citations overall1 paper
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Felix Beckmann 9,628 citations overall1 paper
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Jens Bolten 2,582 citations overall1 paper
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Hao Wang 2,454 citations overall1 paper
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Hongyi Wang 1,686 citations overall1 paper
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Stefan Wagner 1,553 citations overall1 paper