Sensor Systems for Extremely Harsh Environments

IMAPSource Proceedings, vol. 2022

Abstract

Sensors are key elements for capturing environmental properties and are today indispensable in the industry for monitoring and control of industrial processes. Many applications are demanding for highly integrated intelligent sensors to meet the requirements on safety, clean and energy efficient operation or to gain process information in the context of industry 4.0. While in many everyday objects highly integrated sensor systems are already state of the art, the situation in an industrial environment is clearly different. Frequently the use of sensor systems is impossible, due to the fact that the extreme ambient conditions of industrial processes like high operating temperatures or strong mechanical loads do not allow a reliable operation of sensitive electronic components. Eight Fraunhofer Institutes have bundled their competencies and have run the Fraunhofer Lighthouse Project ‘eHarsh’ to overcome this situation. The project goal was to realize sensor systems for extremely harsh environments, whereby sensor systems are not only pure sensor elements, rather containing one or multiple sensor elements and integrated readout electronics. Various technologies which are necessary for the realization of such sensor systems have been identified, developed and finally bundled in a technology platform. These technologies are e. g. MEMS and ceramic based sensors, SOI-CMOS based integrated electronics, board assembly and laser based joining technologies. All these developments have been accompanied by comprehensive tests, material characterization and reliability simulations. Based on the platform a pressure sensor for turbine applications has been realized to prove the performance of the eHarsh technology platform.

Authors 10

1. Holger Kappert corresponding

   Fraunhofer Institute for Microelectronic Circuits and Systems

   Affiliation as printed

   Fraunhofer Institute for Microelectronic Circuits and Systems IMS

   Fraunhofer Institute for Microelectronic Circuits and Systems IMS Finkenstr. 61, 47057 Duisburg, Germany

2. Sebastian Schopferer

   Fraunhofer Institute for High-Speed Dynamics, Ernst-Mach-Institut

   Affiliation as printed

   Fraunhofer Institute for High-Speed Dynamics, Ernst-Mach-Institut

   Fraunhofer Institute for High-Speed Dynamics, Ernst-Mach-Institut, EMI, Efringen-Kirchen, Germany

3. Nooshin Saeidi

   Fraunhofer Institute for Electronic Nano Systems

   Affiliation as printed

   Fraunhofer Institute for Electronic Nano Systems ENAS

   Fraunhofer Institute for Electronic Nano Systems ENAS, Dresden, Germany

4. Ralf Döring

   Fraunhofer Institute for Electronic Nano Systems

   Affiliation as printed

   Fraunhofer Institute for Electronic Nano Systems ENAS

   Fraunhofer Institute for Electronic Nano Systems ENAS, Dresden, Germany

5. Steffen Ziesche

   Fraunhofer Institute for Ceramic Technologies and Systems

   Affiliation as printed

   4Fraunhofer Institute for Ceramic Technologies and Systems IKTS

   Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Dresden, Germany

6. Alexander M. Olowinsky Aachen Fraunhofer Institute for Laser Technology ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer Institute for Laser Technology ILT

   Fraunhofer Institute for Laser Technology ILT, Aachen, Germany

7. Falk Naumann

   Fraunhofer Institute for Microstructure of Materials and Systems

   Affiliation as printed

   Fraunhofer Institute for Microstructure of Materials and Systems IMWS

   Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle, Germany

8. Martin Jägle

   Fraunhofer Institute for Physical Measurement Techniques

   Affiliation as printed

   Fraunhofer Institute for Physical Measurement Techniques IPM

   Fraunhofer Institute for Physical Measurement Techniques IPM, Freiburg, Germany

9. Malte Spanier

   Fraunhofer Institute for Reliability and Microintegration

   Affiliation as printed

   Fraunhofer Institute for Reliability and Microintegration IZM

   Fraunhofer Institute for Reliability and Microintegration IZM, Berlin, Germany

10. Anton Grabmaier

    University of Duisburg-Essen · Fraunhofer Institute for Microelectronic Circuits and Systems

    Affiliation as printed

    Fraunhofer Institute for Microelectronic Circuits and Systems IMS

    University Duisburg-Essen

    Department of Electronic Components and Circuits, University Duisburg-Essen, Duisburg, Germany

    Fraunhofer Institute for Microelectronic Circuits and Systems IMS Finkenstr. 61, 47057 Duisburg, Germany