Graphene MEMS and NEMS

arXiv (Cornell University)

Abstract

Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS and sensor applications.

Authors 7

1. Xuge Fan
2. Chang He

   Beijing Institute of Technology

   Affiliation as printed

   Advanced Research Institute of Multidisciplinary Sciences , Beijing Institute of Technology , 100081 Beijing , China

3. Jie Ding

   Beijing Institute of Technology

   Affiliation as printed

   School of Integrated Circuits and Electronics , Beijing Institute of Technology , 100081 Beijing , China

4. Qiang Gao

   Beijing Institute of Technology

   Affiliation as printed

   Advanced Research Institute of Multidisciplinary Sciences , Beijing Institute of Technology , 100081 Beijing , China

5. Hongliang Ma

   Beijing Institute of Technology

   Affiliation as printed

   Advanced Research Institute of Multidisciplinary Sciences , Beijing Institute of Technology , 100081 Beijing , China

   School of Integrated Circuits and Electronics , Beijing Institute of Technology , 100081 Beijing , China

6. Max C. Lemme Aachen AMO GmbH Chair of Electronic Devices Faculty of Electrical Engineering and Information Technology

   AMO (Germany) · RWTH Aachen University

   Affiliation as printed

   AMO GmbH , Otto-Blumenthal-Str. 25 , 52074 Aachen , Germany

   Chair of Electronic Devices , Faculty of Electrical Engineering and Information Technology , RWTH Aachen University , Otto-Blumenthal-Str. 25 , 52074 Aachen , Germany

7. Wendong Zhang

   North University of China

   Affiliation as printed

   National Key Laboratory for Electronic Measurement Technology , School of Instrument and Electronics , North University of China , Taiyuan 030051 , China

   State Key Laboratory of Dynamic Measurement Technology , North University of China , Taiyuan 030051 , China