Sensor Systems for Extremely Harsh Environments

Journal of Microelectronics and Electronic Packaging, vol. 19

Abstract

Sensors are key elements for capturing environmental properties and are today indispensable in the industry for monitoring and control of industrial processes. Many applications are demanding for highly integrated intelligent sensors to meet the requirements on safety, clean, and energy-efficient operation, or to gain process information in the context of industry 4.0. While in many everyday objects highly integrated sensor systems are already state of the art, the situation in an industrial environment is clearly different. Frequently, the use of sensor systems is impossible due to the fact that the extreme ambient conditions of industrial processes like high operating temperatures or strong mechanical loads do not allow a reliable operation of sensitive electronic components. Eight Fraunhofer Institutes have bundled their competencies and have run the Fraunhofer Lighthouse Project “eHarsh” to overcome this situation. The project goal was to realize sensor systems for extremely harsh environments, whereby sensor systems are more than pure sensors, rather these are containing one or multiple sensing elements and integrated readout electronics. Various technologies, which are necessary for the realization of such sensor systems, have been identified, developed, and finally bundled in a technology platform. These technologies are, e.g., MEMS and ceramic-based sensors, SOI-CMOS-based integrated electronics, board assembly and laser-based joining technologies. All these developments have been accompanied by comprehensive tests, material characterization, and reliability simulations. Based on the platform, a pressure sensor for turbine applications has been realized to prove the performance of the eHarsh technology platform.

Authors 10

1. Holger Kappert corresponding

   Fraunhofer Institute for Microelectronic Circuits and Systems

   Affiliation as printed

   Fraunhofer Institute for Microelectronic Circuits and Systems IMS, Finkenstr

   Fraunhofer Institute for Microelectronic Circuits and Systems IMS, Finkenstr, Duisburg, Germany

2. Sebastian Schopferer

   Fraunhofer Institute for High-Speed Dynamics, Ernst-Mach-Institut

   Affiliation as printed

   2Fraunhofer Institute for High-Speed Dynamics, Ernst-Mach-Institut, EMI

   Fraunhofer Institute for High-Speed Dynamics, Ernst-Mach-Institut, EMI, Efringen-Kirchen, Germany

3. Nooshin Saeidi

   Fraunhofer Institute for Electronic Nano Systems

   Affiliation as printed

   Fraunhofer Institute for Electronic Nano Systems ENAS

   Fraunhofer Institute for Electronic Nano Systems ENAS, Dresden, Germany

4. Ralf Döring

   Fraunhofer Institute for Electronic Nano Systems

   Affiliation as printed

   3Fraunhofer Institute for Electronic Nano Systems ENAS

   Fraunhofer Institute for Electronic Nano Systems ENAS, Dresden, Germany

5. Steffen Ziesche

   Fraunhofer Institute for Ceramic Technologies and Systems

   Affiliation as printed

   4Fraunhofer Institute for Ceramic Technologies and Systems IKTS

   Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Dresden, Germany

6. Alexander M. Olowinsky Aachen Fraunhofer Institute for Laser Technology ILT

   Fraunhofer Institute for Laser Technology

   Affiliation as printed

   Fraunhofer Institute for Laser Technology ILT

   Fraunhofer Institute for Laser Technology ILT, Aachen, Germany

7. Falk Naumann

   Fraunhofer Institute for Microstructure of Materials and Systems

   Affiliation as printed

   Fraunhofer Institute for Microstructure of Materials and Systems IMWS

   Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle, Germany

8. Martin Jägle

   Fraunhofer Institute for Physical Measurement Techniques

   Affiliation as printed

   Fraunhofer Institute for Physical Measurement Techniques IPM

   Fraunhofer Institute for Physical Measurement Techniques IPM, Freiburg, Germany

9. Malte Spanier

   Fraunhofer Institute for Reliability and Microintegration

   Affiliation as printed

   Fraunhofer Institute for Reliability and Microintegration IZM

   Fraunhofer Institute for Reliability and Microintegration IZM, Berlin, Germany

10. Anton Grabmaier

    Fraunhofer Institute for Microelectronic Circuits and Systems · University of Duisburg-Essen

    Affiliation as printed

    Fraunhofer Institute for Microelectronic Circuits and Systems IMS

    Department of Electronic Components and Circuits, University Duisburg-Essen, Duisburg, Germany

    Fraunhofer Institute for Microelectronic Circuits and Systems IMS, Finkenstr, Duisburg, Germany