A Resonant Graphene NEMS Vibrometer

Small, vol. 18, pp. e2201816

Abstract

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

Authors 8

1. Daniel Moreno‐Garcia

   École Polytechnique Fédérale de Lausanne

   Affiliation as printed

   Advanced NEMS Group École Polytechnique Féderale de Lausanne (EPFL) Lausanne 1015 Switzerland

2. Xuge Fan

   Beijing Institute of Technology · KTH Royal Institute of Technology

   Affiliation as printed

   Adv. Research Institute of Multidisciplinary Sciences Beijing Institute of Technology Beijing 100081 China

   Division of Micro and Nanosystems School of Electrical Engineering and Computer Science KTH Royal Institute of Technology Stockholm SE‐10044 Sweden

   Adv. Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing, 100081 China

   Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, SE-10044 Sweden

3. Anderson David Smith

   Chalmers University of Technology

   Affiliation as printed

   Department of Electrical Engineering Chalmers University of Technology Gothenburg 41296 Sweden

   Department of Electrical Engineering, Chalmers University of Technology, Gothenburg, 41296 Sweden

4. Max C. Lemme Aachen Chair of Electronic Devices Faculty of Electrical Engineering and Information Tech Chair of Electronic Devices Faculty of Electrical Engineering and Information Tech

   RWTH Aachen University

   Affiliation as printed

   Chair of Electronic Devices Faculty of Electrical Engineering and Information Tech RWTH Aachen University 52074 Aachen Germany

   Chair of Electronic Devices, Faculty of Electrical Engineering and Information Tech, RWTH Aachen University, 52074 Aachen, Germany

5. Vincenzo Messina

   École Polytechnique Fédérale de Lausanne

   Affiliation as printed

   Advanced NEMS Group École Polytechnique Féderale de Lausanne (EPFL) Lausanne 1015 Switzerland

6. Cristina Martin‐Olmos

   Swiss Integrative Center for Human Health

   Affiliation as printed

   Swiss Integrative Center for Human Health (SICHH) Fribourg 1700 Switzerland

   Swiss Integrative Center for Human Health (SICHH), Fribourg, 1700 Switzerland

7. Frank Niklaus corresponding

   KTH Royal Institute of Technology

   Affiliation as printed

   Division of Micro and Nanosystems School of Electrical Engineering and Computer Science KTH Royal Institute of Technology Stockholm SE‐10044 Sweden

   Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, SE-10044 Sweden

8. Luis Guillermo Villanueva corresponding

   École Polytechnique Fédérale de Lausanne

   Affiliation as printed

   Advanced NEMS Group École Polytechnique Féderale de Lausanne (EPFL) Lausanne 1015 Switzerland