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Papers matching “substrate bias” 48

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HPPMS TiAlCrSiN - Influence of substrate bias and pulse frequency on cutting performance
2020 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, M. Carlet

10

citations
Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics cited by 2 patents

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, Martin Engels

12

citations
Effects of substrate rotation during AlSi-HiPIMS/Ti-DCMS co-sputtering growth of TiAlSiN coatings on phase content, microstructure, and mechanical properties
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Tun-Wei Hsu, Grzegorz Greczyński, Bjarke Holl Christensen, Klaus Pagh Almtoft, Robert D. Boyd, S. Kolozsvári, +6 more

5

citations
Zero‐Bias Power‐Detector Circuits based on MoS2 Field‐Effect Transistors on Wafer‐Scale Flexible Substrates
2022 Advanced Materials article Materials Science 2D Materials and Applications Open access

Eros Reato, Paula Palacios, Burkay Uzlu, Mohamed Saeed, Annika Grundmann, Zhenyu Wang, +10 more

29

citations
From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride
2022 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

8

citations
K-band Mixerless Transmitter Using a Graphene MMIC Process on Flexible Substrate
2024 conference-paper Engineering graph theory and CDMA systems

Chun‐Yu Fan, Muh‐Dey Wei, Renato Negra

0

citations
Influence of the etching process on the coating performance in dry tribological contacts
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

2

citations
Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Films
2022 Materials article Engineering Metallic Glasses and Amorphous Alloys Open access

Michael K. Steinhoff, Damian M. Holzapfel, Soheil Karimi Aghda, Deborah Neuß, P. Pöllmann, Marcus Hans, +3 more

3

citations
Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
2021 Vacuum article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Babak Bakhit, Stanislav Mráz, Jun Lu, Johanna Rosén, Jochen M. Schneider, Lars Hultman, +2 more

18

citations
Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
2020 Journal of Applied Physics article Engineering Metal and Thin Film Mechanics Open access cited by 2 patents

Grzegorz Greczyński, Stanislav Mráz, Jochen M. Schneider, Lars Hultman

72

citations
Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices
2024 Physical Review Materials article Engineering Acoustic Wave Resonator Technologies Open access

Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, Sebastian Siol

19

citations
Influence of Si content on phase stability and mechanical properties of TiAlSiN films grown by AlSi-HiPIMS/Ti-DCMS co-sputtering
2021 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Tun-Wei Hsu, Grzegorz Greczyński, Robert D. Boyd, S. Kolozsvári, Peter Polcik, Stephan Bolz, +2 more

44

citations
Thermal stability and mechanical properties of sputtered (Hf,Ta,V,W,Zr)-diborides
2020 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access

A. Kirnbauer, Antonia Wagner, Vincent Moraes, Daniel Primetzhofer, M. Hans, Jochen M. Schneider, +2 more

90

citations
Pulsed DC Sputter Deposition of Stable Turbostratic Boron Nitride Thin Films
2026 Advanced Materials Interfaces article Materials Science Boron and Carbon Nanomaterials Research Open access

Josef Schätz, Michael Krenzer, T. Schaffus, Martin Otto, Fabian Kühnel, Fabian Streb, +4 more

1

citations
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
2024 arXiv (Cornell University) preprint Engineering Acoustic Wave Resonator Technologies Open access

Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, Sebastian Siol

0

citations
3D Integrated 300°C Tunable RF Oscillator exploiting AlGaN/GaN HEMT for High Temperature Applications
2021 conference-paper Physics and Astronomy GaN-based semiconductor devices and materials

Paula Palacios, Thorsten Zweipfennig, Alessandro Ottaviani, Mohamed Saeed, Carsten Beckmann, M. Alomari, +5 more

7

citations
ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering
2021 Surface and Coatings Technology article Engineering Metallic Glasses and Amorphous Alloys

Niklas Bönninghoff, Wahyu Diyatmika, Jinn Peter Chu, Stanislav Mráz, Jochen M. Schneider, Chien‐Liang Lin, +2 more

25

citations
Influence of residual stresses in hard tool coatings on the cutting performance
2021 Journal of Manufacturing Processes article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, T. Brögelmann, Hans Jürgen Maier, T. Heidenblut, Christoph Kahra, M. Carlet

24

citations
Effect of target peak power density on the phase formation, microstructure evolution, and mechanical properties of Cr2AlC MAX-phase coatings
2020 Journal of the European Ceramic Society article Materials Science MXene and MAX Phase Materials

Holger Rueß, Jonas Werner, Yeliz Unutulmazsoy, Jürgen W. Gerlach, Xiang Chen, Bastian Stelzer, +5 more

23

citations
Cryogenic characteristics of UTBB SOI Schottky-Barrier MOSFETs
2022 Solid-State Electronics article Engineering Advancements in Semiconductor Devices and Circuit Design

Yi Han, Jingxuan Sun, Fengben Xi, Jin Hee Bae, Detlev Grützmacher, Qing‐Tai Zhao

10

citations
Thermal Stability and Mechanical Properties of Sputtered (Hf,Ta,V,W,Zr)-Diborides
2020 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

A. Kirnbauer, Antonia Wagner, Vincent Moraes, Daniel Primetzhofer, M. Hans, Jochen M. Schneider, +2 more

2

citations
Residual Stress Analysis in 30 Μm Thick High-Speed Pvd Coatings
2024 SSRN Electronic Journal preprint Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Max Philip Möbius, Parisa Hassanzadegan Aghdam

0

citations
Toward decoupling the effects of kinetic and potential ion energies: Ion flux dependent structural properties of thin (V,Al)N films deposited by pulsed filtered cathodic arc
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics Open access

Yeliz Unutulmazsoy, Dmitry Kalanov, Soheil Karimi Aghda, Jürgen W. Gerlach, Frans Munnik, Andriy Lotnyk, +2 more

3

citations
Graphene diodes for terahertz rectennas
2026 RWTH Publications (RWTH Aachen) dissertation Engineering Energy Harvesting in Wireless Networks Open access

Andreas Hemmetter

0

citations
Reliable online measurement of population dynamics for filamentous co‐cultures
2022 Microbial Biotechnology article Medicine Microbial Natural Products and Biosynthesis Open access cited by 1 patent

Ana M. Palacio‐Barrera, Ivan Schlembach, Maurice Finger, Jochen Büchs, Miriam A. Rosenbaum

10

citations