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June 06, 2022 article Aachen paper

From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride

Thin Solid Films, vol. 755, pp. 139331

DOI: 10.1016/j.tsf.2022.139331 OpenAlex

Authors 3

  1. Kirsten Bobzin Aachen Surface Engineering Institute IOT

    RWTH Aachen University

    Affiliation as printed

    Surface Engineering Institute IOT, RWTH Aachen University, Kackertstr. 15, Aachen 52072, Germany

  2. C. Kalscheuer Aachen Surface Engineering Institute IOT

    RWTH Aachen University

    Affiliation as printed

    Surface Engineering Institute IOT, RWTH Aachen University, Kackertstr. 15, Aachen 52072, Germany

  3. M. Carlet Aachen Surface Engineering Institute IOT

    RWTH Aachen University

    Affiliation as printed

    Surface Engineering Institute IOT, RWTH Aachen University, Kackertstr. 15, Aachen 52072, Germany

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References 18

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