Zero‐Bias Power‐Detector Circuits based on MoS2 Field‐Effect Transistors on Wafer‐Scale Flexible Substrates
Advanced Materials, vol. 34, pp. e2108469
Abstract
Abstract The design, fabrication, and characterization of wafer‐scale, zero‐bias power detectors based on 2D MoS2 field‐effect transistors (FETs) are demonstrated. The MoS2 FETs are fabricated using a wafer‐scale process on 8 μm‐thick polyimide film, which, in principle, serves as a flexible substrate. The performances of two chemical vapor deposition MoS2 sheets, grown with different processes and showing different thicknesses, are analyzed and compared from the single device fabrication and characterization steps to the circuit level. The power‐detector prototypes exploit the nonlinearity of the transistors above the cut‐off frequency of the devices. The proposed detectors are designed employing a transistor model based on measurement results. The fabricated circuits operate in the Ku‐band between 12 and 18 GHz, with a demonstrated voltage responsivity of 45 V W−1 at 18 GHz in the case of monolayer MoS2 and 104 V W−1 at 16 GHz in the case of multilayer MoS2, both achieved without applied DC bias. They are the best‐performing power detectors fabricated on flexible substrate reported to date. The measured dynamic range exceeds 30 dB, outperforming other semiconductor technologies like silicon complementary metal–oxide–semiconductor circuits and GaAs Schottky diodes.
Authors 16
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AMO (Germany) · RWTH Aachen University
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
Chair of Electronic Devices RWTH Aachen University Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
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Affiliation as printed
Chair of High Frequency Electronics RWTH‐Aachen University Kopernikusstraße 16 52074 Aachen Germany
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AMO (Germany) · RWTH Aachen University
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
Chair of Electronic Devices RWTH Aachen University Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
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Affiliation as printed
Chair of High Frequency Electronics RWTH‐Aachen University Kopernikusstraße 16 52074 Aachen Germany
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Affiliation as printed
Compound Semiconductor Technology RWTH Aachen University Sommerfeldstrasse 18 52074 Aachen Germany
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstrasse 18, 52074 Aachen, Germany
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Zhenyu Wang Aachen
AMO (Germany) · École Polytechnique Fédérale de Lausanne
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
School of Engineering EPFL BM 2141, Station 17 1015 Lausanne Switzerland
School of Engineering, EPFL, BM 2141, Station 17, 1015 Lausanne, Switzerland
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AMO (Germany) · RWTH Aachen University
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
Chair of Electronic Devices RWTH Aachen University Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
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AMO (Germany) · École Polytechnique Fédérale de Lausanne
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
School of Engineering EPFL BM 2141, Station 17 1015 Lausanne Switzerland
AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
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Aixtron (Germany) · RWTH Aachen University
Affiliation as printed
AIXTRON SE Dornkaulstrasse 2 52134 Herzogenrath Germany
Compound Semiconductor Technology RWTH Aachen University Sommerfeldstrasse 18 52074 Aachen Germany
AIXTRON SE, Dornkaulstrasse 2, 52134 Herzogenrath, Germany
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstrasse 18, 52074 Aachen, Germany
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Affiliation as printed
Compound Semiconductor Technology RWTH Aachen University Sommerfeldstrasse 18 52074 Aachen Germany
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstrasse 18, 52074 Aachen, Germany
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Affiliation as printed
Compound Semiconductor Technology RWTH Aachen University Sommerfeldstrasse 18 52074 Aachen Germany
Compound Semiconductor Technology, RWTH Aachen University, Sommerfeldstrasse 18, 52074 Aachen, Germany
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École Polytechnique Fédérale de Lausanne
Affiliation as printed
School of Engineering EPFL BM 2141, Station 17 1015 Lausanne Switzerland
School of Engineering, EPFL, BM 2141, Station 17, 1015 Lausanne, Switzerland
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École Polytechnique Fédérale de Lausanne
Affiliation as printed
School of Engineering EPFL BM 2141, Station 17 1015 Lausanne Switzerland
School of Engineering, EPFL, BM 2141, Station 17, 1015 Lausanne, Switzerland
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University of Wuppertal · AMO (Germany)
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
Bergische Universität Wuppertal Lise‐Meitner‐Str. 13 42 119 Wuppertal Germany
AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
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Affiliation as printed
Chair of High Frequency Electronics RWTH‐Aachen University Kopernikusstraße 16 52074 Aachen Germany
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AMO (Germany) · RWTH Aachen University
Affiliation as printed
AMO GmbH Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
Chair of Electronic Devices RWTH Aachen University Otto‐Blumenthal‐Strasse 25 52074 Aachen Germany
AMO GmbH, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Strasse 25, 52074 Aachen, Germany
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