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Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist2022 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques Open access
David J. Thoen, Vignesh Murugesan, Alejandro Pascual Laguna, K. Karatsu, Akira Endo, J. J. A. Baselmans
10citations -
Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability2021 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques
Mandy Grube, Benjamin Schille, Matthias Schirmer, Maik Gerngroß, Uwe Hübner, Paul Voigt, +1 more
6citations -
Sensor Systems for Extremely Harsh Environments2022 Journal of Microelectronics and Electronic Packaging article Engineering Advanced MEMS and NEMS Technologies Open access
Holger Kappert, Sebastian Schopferer, Nooshin Saeidi, Ralf Döring, Steffen Ziesche, Alexander M. Olowinsky, +4 more
1citations -
Layer-by-Layer Films with CoFe2O4Nanocrystals and Graphene Oxide as a Sensitive Interface in Capacitive Field-Effect Devices2022 ACS Applied Nano Materials article Engineering Electrochemical sensors and biosensors Open access
Paulo Vitor de Morais, Marcelo Ornaghi Orlandi, Michael Josef Schöning, José Roberto Siqueira Junior
3citations -
In Situ Synchrotron Investigations of Beam Diameter Influence on Vapor Capillary Formation during Laser Beam Welding of Copper Alloy with a Blue Laser Beam Source2024 Journal of Manufacturing and Materials Processing article Engineering Welding Techniques and Residual Stresses Open access
Christoph Spurk, Frederik Dietrich, Marc Hummel, Arnold Gillner, Felix Beckmann, Julian P. Moosmann, +1 more
3citations -
Copper‐Based Crystalline‐Metallic Glass Composite Thin Films: A Novel Material with Enhanced Strength and Thermally Stable Nanotwins2026 Advanced Functional Materials article Engineering Metallic Glasses and Amorphous Alloys Open access
Chunhua Tian, Amit Sharma, Krzysztof Wieczerzak, Alexander Groetsch, Nicolò Maria della Ventura, Remo N. Widmer, +4 more
0citations
12 results