A Aralex Aachen research explorer

Benjamin Schille Sign in to save

OpenAlex Aachen author

Currently: University of Rostock · RWTH Aachen University

1.25k

Citations

4

h-index

2

i10-index

5

Works (all)

1

Aachen papers

Departments & institutes in Aachen

Chair for Technology of Optical Systems RWTH Aachen University

1 paper · 2021

Affiliations exactly as printed on papers (2)

1× Allresist GmbH 1 , Am Biotop 14, Strausberg 15344, Germany
1× 4RWTH Aachen University TOS, Chair for Technology of Optical Systems, Aachen 52074, Germany

Papers 1 stored

All · Aachen affiliation only

Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability
2021 Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena article Engineering Advancements in Photolithography Techniques

6

citations

1 result

Affiliation history

RWTH Aachen University DE · 2021
University of Rostock DE · 2017–2021

Line of work

Conducting polymers and applications 2

Materials Science › Polymers and Plastics
Electrochemical Analysis and Applications 2

Chemistry › Electrochemistry
Electrocatalysts for Energy Conversion 1

Energy › Renewable Energy, Sustainability and the Environment
Semiconductor materials and devices 1

Engineering › Electrical and Electronic Engineering
Ionic liquids properties and applications 1

Chemical Engineering › Catalysis

Citations per year

17

18

21

Institutions on Aachen-era papers

RWTH Aachen University 1

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Frequent co-authors

Profile fetched: 05 Oct 04:22