Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography

Ultramicroscopy, vol. 249, pp. 113720

Authors 10

1. Haoyan Lu Aachen Experimental Physics of EUV

   RWTH Aachen University · University of Southampton

   Affiliation as printed

   Zepler Institute(1), University of Southampton, Southampton SO17 1BJ, UK; Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

2. Michal Odstrčil Aachen Experimental Physics of EUV

   RWTH Aachen University · University of Southampton

   Affiliation as printed

   Zepler Institute(1), University of Southampton, Southampton SO17 1BJ, UK; Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

3. Charles Pooley

   University of Southampton

   Affiliation as printed

   Zepler Institute(1), University of Southampton, Southampton SO17 1BJ, UK

   Zepler Institute, University of Southampton, Southampton SO17 1BJ, UK

4. Jan Biller Aachen Experimental Physics of EUV

   RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

   Affiliation as printed

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany; Peter Grünberg Institut (PGI-9), JARA-FIT, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

   Peter Grünberg Institut (PGI-9), JARA-FIT, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany

5. Mikheil Mebonia Aachen Experimental Physics of EUV

   RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

   Affiliation as printed

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany; Peter Grünberg Institut (PGI-9), JARA-FIT, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

   Peter Grünberg Institut (PGI-9), JARA-FIT, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany

6. Guanze He

   University of Oxford

   Affiliation as printed

   Department of Engineering Science, University of Oxford, Oxford OX1 3PJ, UK

7. Matthew F. Praeger

   University of Southampton

   Affiliation as printed

   Zepler Institute(1), University of Southampton, Southampton SO17 1BJ, UK

   Zepler Institute, University of Southampton, Southampton SO17 1BJ, UK

8. Larissa Juschkin Aachen Experimental Physics of EUV

   RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

   Affiliation as printed

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany; Peter Grünberg Institut (PGI-9), JARA-FIT, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany

   Experimental Physics of EUV, JARA-FIT, RWTH Aachen University, 52074 Aachen, Germany

   Peter Grünberg Institut (PGI-9), JARA-FIT, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany

9. Jeremy Graham Frey

   University of Southampton

   Affiliation as printed

   Department of Chemistry, University of Southampton, Southampton SO17 1BJ, UK

10. William S Brocklesby corresponding

    University of Southampton

    Affiliation as printed

    Zepler Institute(1), University of Southampton, Southampton SO17 1BJ, UK. Electronic address: wsb@orc.soton.ac.uk

    Zepler Institute, University of Southampton, Southampton SO17 1BJ, UK