November 06, 2025 article Open access Programmable structured DUV illumination by coherent harmonic generation at crystalline solids for nanometer-resolution inspection of periodic samples PhotoniX DOI: 10.1186/s43074-025-00206-2 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 3 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography 2023 Ultramicroscopy article Physics and Astronomy Advanced X-ray Imaging Techniques Open access 15 citations 1 result