Papers matching “extreme ultraviolet mirrors” 8
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Unlocking the potential of x-ray interferometry: manufacturing ultraflat slatted mirrors with silicon pore optics2026 Space Telescopes and Instrumentation: Ultraviolet to Gamma Ray conference-abstract Physics and Astronomy Astronomy and Astrophysical Research
Luc Voruz, Alex Bayerle, Ramses Günther, Christian Körnig, Adam Lassise, Bruno Da Conceição de Menezes, +3 more
0citations -
High-resolution silicon pore x-ray optics2023 International Conference on Extreme Ultraviolet Lithography conference-abstract Physics and Astronomy Astronomy and Astrophysical Research
Boris Landgraf, Nicolas M. Barrière, Alex Bayerle, Maximilien J. Collon, David A. Girou, Laurens Keek, +7 more
0citations -
Design and realization of an in-lab EUV dual beamline for industrial and scientific applications2021 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Peter Loosen, Carlo Holly
3citations -
High-precision optical constant characterization of materials in the EUV spectral range: from large research facilities to laboratory-based instruments2022 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques
Victor Soltwisch, Sven Glabisch, Anna Andrle, Vicky Philipsen, Qais Saadeh, Sophia Schröder, +3 more
2citations
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