Experimental Physics of EUV

• Detlev Grützmacher

  Forschungszentrum Jülich · Ernst Ruska Centre Physics and Astronomy
  12.8k

  citations

  58

  h-index

  52

  Aachen papers
• Michal Odstrčil

  European Synchrotron Radiation Facility · Paul Scherrer Institute Physics and Astronomy
  2.78k

  citations

  25

  h-index

  2

  Aachen papers
• Larissa Juschkin

  Engineering
  826

  citations

  16

  h-index

  6

  Aachen papers
• Jan Biller

  ASML (Netherlands) Physics and Astronomy
  24

  citations

  3

  h-index

  2

  Aachen papers
• Haoyan Lu

  University of Southampton · RWTH Aachen University Physics and Astronomy
  15

  citations

  1

  h-index

  1

  Aachen papers
• Mikheil Mebonia

  Forschungszentrum Jülich · Jülich Aachen Research Alliance Physics and Astronomy
  15

  citations

  1

  h-index

  1

  Aachen papers
• Maciej Grochowicz

  RWTH Aachen University Physics and Astronomy
  9

  citations

  2

  h-index

  1

  Aachen papers
• Florian Melsheimer

  Forschungszentrum Jülich · KLA (United States) Physics and Astronomy
  4

  citations

  1

  h-index

  3

  Aachen papers
• Michael Ranis

  Forschungszentrum Jülich · Jülich Aachen Research Alliance Physics and Astronomy
  3

  citations

  1

  h-index

  1

  Aachen papers

9 results

• Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography

  2023 Ultramicroscopy article Physics and Astronomy Advanced X-ray Imaging Techniques Open access

  15

  citations
• Computational proximity lithography with extreme ultraviolet radiation

  2020 Optics Express article Engineering Advancements in Photolithography Techniques Open access

  6

  citations
• High speed imaging of Z-pinch gas discharge in extreme ultraviolet and model-based three-dimensional reconstruction of emitting volume

  2022 Review of Scientific Instruments article Physics and Astronomy Laser-Plasma Interactions and Diagnostics

  3

  citations

3 results