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Papers matching “sputtering power” 54

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Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Plasma Diagnostics and Applications Open access

Max Renner, Joel Fischer, Hamidreza Hajihoseini, Jón Tómas Guðmundsson, Martin Rudolph, Daniel Lundin

19

citations
Influences of RF Magnetron Sputtering Power and Gas Flow Rate on a High Conductivity and Low Drift Rate of Tungsten-Rhenium Thin-Film Thermocouples
2022 Nanomaterials article Engineering Advanced Sensor Technologies Research Open access

Zhongkai Zhang, Bian Tian, Gong Cheng, Zhaojun Liu, Jiangjiang Liu, Bingfei Zhang, +6 more

14

citations
High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, Max Philip Möbius, M. Miranda Marti

3

citations
Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices
2024 Physical Review Materials article Engineering Acoustic Wave Resonator Technologies Open access

Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, Sebastian Siol

19

citations
ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering
2021 Surface and Coatings Technology article Engineering Metallic Glasses and Amorphous Alloys

Niklas Bönninghoff, Wahyu Diyatmika, Jinn Peter Chu, Stanislav Mráz, Jochen M. Schneider, Chien‐Liang Lin, +2 more

25

citations
Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics cited by 2 patents

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, Martin Engels

12

citations
Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes
2023 Thin Solid Films article Engineering Plasma Diagnostics and Applications cited by 1 patent

Kirsten Bobzin, C. Kalscheuer, M. Carlet, Julia Janowitz

11

citations
From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride
2022 Thin Solid Films article Engineering Plasma Diagnostics and Applications

Kirsten Bobzin, C. Kalscheuer, M. Carlet

8

citations
Oxidation resistance and mechanical properties of sputter-deposited Ti0.9Al0.1B2-y thin films
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Jimmy Thörnberg, Stanislav Mráz, Justinas Pališaitis, Fedor F. Klimashin, Pavel Ondračka, Babak Bakhit, +7 more

20

citations
Transparent Conductive Oxide Sputtering Damage on Contact Passivation in Silicon Heterojunction Solar Cells with Hydrogenated Nanocrystalline Silicon
2022 Solar RRL article Engineering Silicon and Solar Cell Technologies Open access

Depeng Qiu, Weiyuan Duan, Andreas Lambertz, Alexander Eberst, Karsten Bittkau, Uwe Rau, +1 more

27

citations
Coatings for Core–Shell Composite Micro‐Lattice Structures: Varying Sputtering Parameters
2021 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics

Alina R. Garcia-Taormina, Chantal Kurpiers, Ruth Schwaiger, Andrea Maria Hodge

5

citations
Effects of substrate rotation during AlSi-HiPIMS/Ti-DCMS co-sputtering growth of TiAlSiN coatings on phase content, microstructure, and mechanical properties
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Tun-Wei Hsu, Grzegorz Greczyński, Bjarke Holl Christensen, Klaus Pagh Almtoft, Robert D. Boyd, S. Kolozsvári, +6 more

5

citations
Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
2021 Vacuum article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Babak Bakhit, Stanislav Mráz, Jun Lu, Johanna Rosén, Jochen M. Schneider, Lars Hultman, +2 more

18

citations
Deviations between film and target compositions induced by backscattered Ar during sputtering from M2-Al-C (M = Cr, Zr, and Hf) composite targets
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics

Yu‐Ping Chien, Stanislav Mráz, Matej Fekete, Marcus Hans, Daniel Primetzhofer, S. Kolozsvári, +2 more

14

citations
Hybrid reactive sputtering of transition metal aluminum oxynitrides
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

1

citations
Impact Resistance and Properties of (Cr,Al,Si)N Coatings Deposited by Gas Flow Sputtering with Pulsed DC Supply
2021 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Parisa Hassanzadegan Aghdam

12

citations
Influence of Si content on phase stability and mechanical properties of TiAlSiN films grown by AlSi-HiPIMS/Ti-DCMS co-sputtering
2021 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Tun-Wei Hsu, Grzegorz Greczyński, Robert D. Boyd, S. Kolozsvári, Peter Polcik, Stephan Bolz, +2 more

44

citations
Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics

Lena Patterer, S. Kollmann, Teresa de los Arcos, Leonie Jende, Soheil Karimi Aghda, Damian M. Holzapfel, +4 more

3

citations
Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate
2023 RWTH Publications (RWTH Aachen) article Engineering Metal and Thin Film Mechanics Open access

Lena Patterer, S. Kollmann, Teresa de los Arcos, Leonie Jende, Soheil Karimi Aghda, Damian M. Holzapfel, +4 more

1

citations
Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture
2022 Plasma Sources Science and Technology article Engineering Metal and Thin Film Mechanics Open access

Matej Fekete, Michael Kröker, Pavel Souček, Peter Klein, Petr Vašina

2

citations
The influence of microstructural orientation on fracture toughness in (V, Al)N and (V, Al)(O, N) coatings as measured by microcantilever bending
2023 Journal of materials research/Pratt's guide to venture capital sources article Engineering Metal and Thin Film Mechanics Open access

Markus R. Schoof, Soheil Karimi Aghda, Carl F. Kusche, Marcus Hans, Jochen M. Schneider, Sandra Korte‐Kerzel, +1 more

10

citations
Crack Resistance of Diamond‐Like Carbon Coatings
2021 Vakuum in Forschung und Praxis article Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, T. Brögelmann, M. Carlet, N.C. Kruppe, Martin Engels, Mostafa Arghavani

2

citations
Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
2020 Journal of Applied Physics article Engineering Metal and Thin Film Mechanics Open access cited by 2 patents

Grzegorz Greczyński, Stanislav Mráz, Jochen M. Schneider, Lars Hultman

72

citations
PVD Coated Tools and Surface-Structured Workpieces in Dry Cold Forming of Steel
2020 Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forum article Engineering Tribology and Lubrication Engineering Open access

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, Thomas Bergs, Patrick Mattfeld, Daniel Trauth, +2 more

3

citations
Oxidation and wear behavior of CrAlMoN with varied Mo-content for cutting Ti6Al4V
2023 Production Engineering article Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Nina Stachowski, Jan Dege, Wolfgang Hintze, Carsten Möller, +1 more

2

citations