Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes

Thin Solid Films, vol. 777, pp. 139903

Authors 4

1. Kirsten Bobzin Aachen Surface Engineering Institute (IOT)

   RWTH Aachen University

   Affiliation as printed

   Surface Engineering Institute, RWTH Aachen University, Kackertstr. 15, D-52072 Aachen, Germany

2. C. Kalscheuer Aachen Surface Engineering Institute (IOT)

   RWTH Aachen University

   Affiliation as printed

   Surface Engineering Institute, RWTH Aachen University, Kackertstr. 15, D-52072 Aachen, Germany

3. M. Carlet Aachen Surface Engineering Institute (IOT)

   RWTH Aachen University

   Affiliation as printed

   Surface Engineering Institute, RWTH Aachen University, Kackertstr. 15, D-52072 Aachen, Germany

4. Julia Janowitz corresponding Aachen Surface Engineering Institute (IOT)

   RWTH Aachen University

   Affiliation as printed

   Surface Engineering Institute, RWTH Aachen University, Kackertstr. 15, D-52072 Aachen, Germany