Coatings for Core–Shell Composite Micro‐Lattice Structures: Varying Sputtering Parameters

Advanced Engineering Materials, vol. 24

Abstract

Magnetron sputtering has garnered increased attention as a versatile deposition method for generating novel core–shell composite nano‐ and micro‐lattice materials spanning a wide range of properties and functionalities. Sputtering offers an expansive material workspace consisting of a wide range of ceramics, single‐element metals, and alloy systems. However, achieving uniform coatings on such fine‐featured structures remains a challenge. Thus, herein, a foundational assessment of various sputtering configurations, cathode geometries, and deposition parameters is carried out to investigate their implications on the coating thickness and uniformity of 3D micro‐lattice scaffolds. Specifically, tetrahedral‐truss structures fabricated via direct laser writing are coated by leveraging planar and inverted cylindrical magnetron cathodes at select deposition rates, sputtering powers, and Ar working pressures. Both plasma focused ion beam and microtome sectioning techniques are employed to evaluate the cross section of individual struts and assess overall uniformity. Overall, the influence of key sputtering factors on the design and development of core–shell composite nano‐ and micro‐lattice materials is highlighted and a pathway for future sputter coating optimization on these complex structures is provided.

Authors 4

1. Alina R. Garcia-Taormina

   University of Southern California

   Affiliation as printed

   Mork Family Department of Chemical Engineering and Materials Science, Department of Aerospace and Mechanical Engineering University of Southern California Los Angeles CA 90089 USA

   Mork Family Department of Chemical Engineering and Materials Science, Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089 USA

2. Chantal Kurpiers

   Karlsruhe Institute of Technology

   Affiliation as printed

   3DMM2O - Cluster of Excellence (EXC-2082/1 – 390761711) Karlsruhe Institute of Technology (KIT) 76131 Karlsruhe Germany

   Institute for Applied Materials (IAM) Karlsruhe Institute of Technology (KIT) 76344 Eggenstein-Leopoldshafen Germany

   Institute for Applied Materials (IAM), Karlsruhe Institute of Technology (KIT), 76344 Eggenstein-Leopoldshafen, Germany

3. Ruth Schwaiger Aachen Chair of Energy Engineering Materials

   Karlsruhe Institute of Technology · Forschungszentrum Jülich · RWTH Aachen University

   Affiliation as printed

   3DMM2O - Cluster of Excellence (EXC-2082/1 – 390761711) Karlsruhe Institute of Technology (KIT) 76131 Karlsruhe Germany

   Chair of Energy Engineering Materials RWTH Aachen University 52056 Aachen Germany

   Institute of Energy and Climate Research (IEK) Forschungszentrum Jülich 52425 Juelich Germany

   3DMM2O - Cluster of Excellence (EXC-2082/1 – 390761711) Karlsruhe Institute of Technology (KIT) 76131 Karlsruhe Germany

4. Andrea Maria Hodge corresponding

   University of Southern California

   Affiliation as printed

   Mork Family Department of Chemical Engineering and Materials Science, Department of Aerospace and Mechanical Engineering University of Southern California Los Angeles CA 90089 USA

   Mork Family Department of Chemical Engineering and Materials Science, Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089 USA