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Papers matching “magnetron sputtering” 82

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Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Plasma Diagnostics and Applications Open access

Max Renner, Joel Fischer, Hamidreza Hajihoseini, Jón Tómas Guðmundsson, Martin Rudolph, Daniel Lundin

19

citations
Influences of RF Magnetron Sputtering Power and Gas Flow Rate on a High Conductivity and Low Drift Rate of Tungsten-Rhenium Thin-Film Thermocouples
2022 Nanomaterials article Engineering Advanced Sensor Technologies Research Open access

Zhongkai Zhang, Bian Tian, Gong Cheng, Zhaojun Liu, Jiangjiang Liu, Bingfei Zhang, +6 more

14

citations
High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, Max Philip Möbius, M. Miranda Marti

3

citations
Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices
2024 Physical Review Materials article Engineering Acoustic Wave Resonator Technologies Open access

Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, Sebastian Siol

19

citations
Correlative Theoretical and Experimental Study of the Polycarbonate | X Interfacial Bond Formation (X = AlN, TiN, (Ti,Al)N) During Magnetron Sputtering
2023 Advanced Materials Interfaces article Engineering Metal and Thin Film Mechanics Open access

Lena Patterer, Pavel Ondračka, Dimitri Bogdanovski, Stanislav Mráz, Soheil Karimi Aghda, Yu‐Ping Chien, +1 more

6

citations
Correlative Theoretical and Experimental Study of the Polycarbonate | X Interfacial Bond Formation (X = AlN, TiN, TiAlN) during Magnetron Sputtering
2023 RWTH Publications (RWTH Aachen) article Engineering Metal and Thin Film Mechanics Open access

Lena Patterer, Pavel Ondračka, Dimitri Bogdanovski, Stanislav Mráz, Soheil Karimi Aghda, Yu‐Ping Chien, +1 more

1

citations
ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering
2021 Surface and Coatings Technology article Engineering Metallic Glasses and Amorphous Alloys

Niklas Bönninghoff, Wahyu Diyatmika, Jinn Peter Chu, Stanislav Mráz, Jochen M. Schneider, Chien‐Liang Lin, +2 more

25

citations
Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics cited by 2 patents

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, Martin Engels

12

citations
Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes
2023 Thin Solid Films article Engineering Plasma Diagnostics and Applications cited by 1 patent

Kirsten Bobzin, C. Kalscheuer, M. Carlet, Julia Janowitz

11

citations
From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride
2022 Thin Solid Films article Engineering Plasma Diagnostics and Applications

Kirsten Bobzin, C. Kalscheuer, M. Carlet

8

citations
Structural and electrical properties of fiber textured and epitaxial molybdenum thin films prepared by magnetron sputter epitaxy
2025 Applied Physics Letters article Engineering Acoustic Wave Resonator Technologies Open access

Balasubramanian Sundarapandian, Mohit Raghuwanshi, Patrik Straňák, Yuan Yu, Haiyan Lyu, Mario Prescher, +2 more

8

citations
Oxidation resistance and mechanical properties of sputter-deposited Ti0.9Al0.1B2-y thin films
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Jimmy Thörnberg, Stanislav Mráz, Justinas Pališaitis, Fedor F. Klimashin, Pavel Ondračka, Babak Bakhit, +7 more

20

citations
Phase formation, thermal stability and mechanical properties of Nb-B-C coatings prepared by combinatorial magnetron sputtering
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics

Stanislava Debnárová, Pavel Souček, Vilma Buršı́ková, Marcus Hans, Damian M. Holzapfel, Stanislav Mráz, +2 more

9

citations
Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target
2020 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Ion-surface interactions and analysis Open access

Martin Rausch, Stanislav Mráz, Patrice Kreiml, Megan Jo Cordill, Jochen M. Schneider, Jörg Winkler, +1 more

5

citations
Effects of substrate rotation during AlSi-HiPIMS/Ti-DCMS co-sputtering growth of TiAlSiN coatings on phase content, microstructure, and mechanical properties
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Tun-Wei Hsu, Grzegorz Greczyński, Bjarke Holl Christensen, Klaus Pagh Almtoft, Robert D. Boyd, S. Kolozsvári, +6 more

5

citations
Coatings for Core–Shell Composite Micro‐Lattice Structures: Varying Sputtering Parameters
2021 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics

Alina R. Garcia-Taormina, Chantal Kurpiers, Ruth Schwaiger, Andrea Maria Hodge

5

citations
Deviations between film and target compositions induced by backscattered Ar during sputtering from M2-Al-C (M = Cr, Zr, and Hf) composite targets
2022 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics

Yu‐Ping Chien, Stanislav Mráz, Matej Fekete, Marcus Hans, Daniel Primetzhofer, S. Kolozsvári, +2 more

14

citations
Hybrid reactive sputtering of transition metal aluminum oxynitrides
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

1

citations
Evaluation of anti-adhesive and corrosion protection properties of TiAlSiN-magnetron-sputtered films for applications in polymer processing
2025 Thin Solid Films article Engineering Metal and Thin Film Mechanics Open access

Chantal Theile‐Rasche, Fuzeng Wang, Tim Prüßner, Marten Huck, Hans‐Georg Steinrück, Teresa de los Arcos

2

citations
Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
2021 Vacuum article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Babak Bakhit, Stanislav Mráz, Jun Lu, Johanna Rosén, Jochen M. Schneider, Lars Hultman, +2 more

18

citations
A comprehensive multi-scale study on the growth mechanisms of magnetron sputtered coatings on open-cell 3D foams
2025 Progress in Energy article Engineering Plasma Diagnostics and Applications

Loris Chavée, Émile Haye, Jochen M. Schneider, Stanislav Mráz, Andreas Pflug, Armel Descamps‐Mandine, +6 more

1

citations
Impact Resistance and Properties of (Cr,Al,Si)N Coatings Deposited by Gas Flow Sputtering with Pulsed DC Supply
2021 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Parisa Hassanzadegan Aghdam

12

citations
Influence of Si content on phase stability and mechanical properties of TiAlSiN films grown by AlSi-HiPIMS/Ti-DCMS co-sputtering
2021 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Tun-Wei Hsu, Grzegorz Greczyński, Robert D. Boyd, S. Kolozsvári, Peter Polcik, Stephan Bolz, +2 more

44

citations
Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture
2022 Plasma Sources Science and Technology article Engineering Metal and Thin Film Mechanics Open access

Matej Fekete, Michael Kröker, Pavel Souček, Peter Klein, Petr Vašina

2

citations
Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics

Lena Patterer, S. Kollmann, Teresa de los Arcos, Leonie Jende, Soheil Karimi Aghda, Damian M. Holzapfel, +4 more

3

citations