Flexible Complementary Metal‐Oxide‐Semiconductor Inverter Based on 2D p‐type WSe 2 and n‐type MoS 2
physica status solidi (a), vol. 221
Abstract
Transition metal dichalcogenides (TMDCs) are a promising class of two‐dimensional (2D) materials for flexible electronic applications due to their low integration temperature, good electronic properties, and excellent mechanical flexibility. Moreover, TMDCs offer the possibility of co‐integrating both n‐ and p‐type transistors on the same substrate, enabling the realization of complementary metal‐oxide‐semiconductor (CMOS) circuits. In this study, n‐type MoS 2 field‐effect transistors (FETs), and p‐type WSe 2 ‐FETs integrated on a flexible foil substrate fabricated by standard thin‐film technology are presented. These devices exhibit high stability in their electronic operation under strain and repeated bending cycles. A CMOS inverter based on these transistors is also successfully demonstrated, which shows excellent switching behaviour with high gain (up to 100), high noise margin (0.87 · V DD ), and low average static power consumption (40 pW).
Authors 11
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Agata Piacentini corresponding Aachen Chair of Electronic Devices Advanced Microelectronic Center Aachen
AMO (Germany) · RWTH Aachen University
Affiliation as printed
Advanced Microelectronic Center Aachen (AMICA) AMO GmbH 52074 Aachen Germany
Chair of Electronic Devices RWTH Aachen University 52074 Aachen Germany
Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, 52074 Aachen, Germany
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Affiliation as printed
Institute of Photonics TU Wien 1040 Vienna Austria
Institute of Photonics, TU Wien, 1040 Vienna, Austria
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Affiliation as printed
Advanced Microelectronic Center Aachen (AMICA) AMO GmbH 52074 Aachen Germany
Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, 52074 Aachen, Germany
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Affiliation as printed
Compound Semiconductor Technology RWTH Aachen University 52074 Aachen Germany
Compound Semiconductor Technology, RWTH Aachen University, 52074 Aachen, Germany
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Aixtron (Germany) · RWTH Aachen University
Affiliation as printed
AIXTRON SE 52134 Herzogenrath Germany
Compound Semiconductor Technology RWTH Aachen University 52074 Aachen Germany
AIXTRON SE, 52134 Herzogenrath, Germany
Compound Semiconductor Technology, RWTH Aachen University, 52074 Aachen, Germany
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Affiliation as printed
Compound Semiconductor Technology RWTH Aachen University 52074 Aachen Germany
Compound Semiconductor Technology, RWTH Aachen University, 52074 Aachen, Germany
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Affiliation as printed
Compound Semiconductor Technology RWTH Aachen University 52074 Aachen Germany
Compound Semiconductor Technology, RWTH Aachen University, 52074 Aachen, Germany
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Affiliation as printed
Advanced Microelectronic Center Aachen (AMICA) AMO GmbH 52074 Aachen Germany
Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, 52074 Aachen, Germany
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AMO (Germany) · RWTH Aachen University
Affiliation as printed
Advanced Microelectronic Center Aachen (AMICA) AMO GmbH 52074 Aachen Germany
Chair of Electronic Devices RWTH Aachen University 52074 Aachen Germany
Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, 52074 Aachen, Germany
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Affiliation as printed
Institute of Photonics TU Wien 1040 Vienna Austria
Institute of Photonics, TU Wien, 1040 Vienna, Austria
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University of Wuppertal · AMO (Germany)
Affiliation as printed
Advanced Microelectronic Center Aachen (AMICA) AMO GmbH 52074 Aachen Germany
Bergische Universität Wuppertal 42119 Wuppertal Germany
Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, 52074 Aachen, Germany
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