A Aralex Aachen research explorer

Maciej Grochowicz Sign in to save

OpenAlex Aachen author

Currently: RWTH Aachen University

9

Citations

2

h-index

0

i10-index

2

Works (all)

1

Aachen papers

Departments & institutes in Aachen

Experimental Physics of EUV RWTH Aachen University

1 paper · 2020

Affiliations exactly as printed on papers (1)

1× Experimental Physics of EUV, RWTH Aachen University EUV, Steinbachstr. 15, 52074 Aachen, Germany

Papers 1 stored

All · Aachen affiliation only

Computational proximity lithography with extreme ultraviolet radiation
2020 Optics Express article Engineering Advancements in Photolithography Techniques Open access

6

citations

1 result

Affiliation history

RWTH Aachen University DE · 2018–2020

Line of work

Advanced X-ray Imaging Techniques 2

Physics and Astronomy › Radiation
Advancements in Photolithography Techniques 2

Engineering › Electrical and Electronic Engineering
Advanced Electron Microscopy Techniques and Applications 1

Biochemistry, Genetics and Molecular Biology › Structural Biology
Optical Coatings and Gratings 1

Materials Science › Surfaces, Coatings and Films

Citations per year

18

20

Institutions on Aachen-era papers

RWTH Aachen University 1

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Frequent co-authors

Profile fetched: 05 Oct 04:22