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Investigation of stochastic roughness effects for nanoscale grating characterization with a stand-alone EUV spectrometer2022 SPIE Photomask Technology Conference conference-paper Engineering Advancements in Photolithography Techniques
Sven Glabisch, Sophia Schröder, Sascha Brose, Henning Heiming, Jochen Stollenwerk, Carlo Holly
1citations -
Broadband reflective spectrometer for high-resolution spectral characterization of radiation sources2024 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Calibration and Measurement Techniques
Ismael Gisch, Sophia Schröder, Sven Glabisch, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, +1 more
1citations
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