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Aachen papers per year
22
Papers 1
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Investigation of stochastic roughness effects for nanoscale grating characterization with a stand-alone EUV spectrometer2022 SPIE Photomask Technology Conference conference-paper Engineering Advancements in Photolithography Techniques
Sven Glabisch, Sophia Schröder, Sascha Brose, Henning Heiming, Jochen Stollenwerk, Carlo Holly
1citations
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Most active Aachen authors
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Jochen Stollenwerk 1,789 citations overall1 paper
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Carlo Holly 421 citations overall1 paper
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Sascha Brose 277 citations overall1 paper
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Sven Glabisch 66 citations overall1 paper
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Sophia Schröder 50 citations overall1 paper
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Henning Heiming 15 citations overall1 paper