From

Institution

Field

Type

Open access only Cited by patents (Lens) Include non-Aachen papers (citing/cited)

Reset

Papers matching “thin film processing” 208

Sort: Relevance Cited Newest Oldest Fwci Patents ⇩ CSV

Not finding it? Sign in to also search OpenAlex live.

Transient magnesium‐based thin‐film temperature sensor on a flexible, bioabsorbable substrate for future medical applications
2023 Applied Research article Engineering Advanced Sensor and Energy Harvesting Materials Open access

Kevin A. Janus, Stefan Achtsnicht, Aleksander Drinic, Alexander Kopp, Michael Keusgen, Michael Josef Schöning

7

citations
Understanding Electrical Failure of Polyimide-Based Flexible Neural Implants: The Role of Thin Film Adhesion
2022 Polymers article Neuroscience Neuroscience and Neural Engineering Open access

Marcel Tintelott, Andreas Schander, Walter Lang

18

citations
Plasma etching for the compatibility of thin film metallic coatings and direct bonding of silicon pore optics
2020 Journal of Applied Physics article Engineering 3D IC and TSV technologies Open access

David A. Girou, Sonny Massahi, Desirée Della Monica Ferreira, Finn E. Christensen, Boris Landgraf, Brian Shortt, +2 more

15

citations
Evaluation of the membrane performance of ultra-smooth silicon organic coatings depending on the process energy density
2022 Thin Solid Films article Engineering Membrane Separation and Gas Transport

Lara Kleines, Stefan Wilski, Philipp Alizadeh, Jens Rubner, Matthias Weßling, Christian Hopmann, +1 more

7

citations
Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system
2021 RWTH Publications (RWTH Aachen) article Engineering Advancements in Photolithography Techniques Open access

Bin Sun, Thomas Grap, Thorben Frahm, Joachim Knoch

8

citations
In Situ X-ray Measurements to Follow the Crystallization of BaTiO3 Thin Films during RF-Magnetron Sputter Deposition
2021 Applied Sciences article Materials Science Ferroelectric and Piezoelectric Materials Open access

Peter Walter, Markus Ilchen, Jan Torben Roeh, Wiebke Ohm, Christian Bonar Zeuthen, Uwe Klemradt

1

citations
Delineating the interplay effects of microstructure topology and residual stresses in ultrafast laser irradiated thin films
2026 Journal of Materials Research and Technology article Engineering Laser Material Processing Techniques Open access

Hariprasath Ganesan, Stefan Sandfeld

0

citations
Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
2020 Journal of Applied Physics article Engineering Metal and Thin Film Mechanics Open access cited by 2 patents

Grzegorz Greczyński, Stanislav Mráz, Jochen M. Schneider, Lars Hultman

72

citations
PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films
2023 Plasma Processes and Polymers article Engineering Membrane Separation and Gas Transport Open access

Teresa de los Arcos, Peter Awakowicz, Marc Böke, Nils Boysen, Ralf Peter Brinkmann, Rainer Dahlmann, +16 more

8

citations
PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
2023 arXiv (Cornell University) preprint Engineering Membrane Separation and Gas Transport Open access

Teresa de los Arcos, Peter Awakowicz, Marc Böke, Nils Boysen, Ralf Peter Brinkmann, Rainer Dahlmann, +16 more

1

citations
Compatibility of iridium thin films with the silicon pore optics technology for Athena
2021 conference-paper Physics and Astronomy Astronomy and Astrophysical Research Open access

Sara Svendsen, Desirée Della Monica Ferreira, Sonny Massahi, Peter Lindquist Henriksen, Nis C. Gellert, Arne S. Jegers, +7 more

7

citations
Laser-based, direct formation of thin copper–nickel alloy films with low thermal coefficient of resistivity
2022 Journal of Applied Physics article Engineering Nanomaterials and Printing Technologies Open access

Samuel Fink, Linus Dahmen, Michael K. Steinhoff, Jochen Stollenwerk, Christian Vedder

8

citations
Pulsed DC Sputter Deposition of Stable Turbostratic Boron Nitride Thin Films
2026 Advanced Materials Interfaces article Materials Science Boron and Carbon Nanomaterials Research Open access

Josef Schätz, Michael Krenzer, T. Schaffus, Martin Otto, Fabian Kühnel, Fabian Streb, +4 more

1

citations
Evaluation of anti-adhesive and corrosion protection properties of TiAlSiN-magnetron-sputtered films for applications in polymer processing
2025 Thin Solid Films article Engineering Metal and Thin Film Mechanics Open access

Chantal Theile‐Rasche, Fuzeng Wang, Tim Prüßner, Marten Huck, Hans‐Georg Steinrück, Teresa de los Arcos

2

citations
Interface chemistry and adhesion of thin bilayer Si-organic PECVD barrier films on post-consumer recycled polypropylene
2025 Surface and Coatings Technology article Materials Science Polymer Surface Interaction Studies Open access

Hendrik Müller, Ali Cetin, Rainer Dahlmann, Teresa de los Arcos, Guido Grundmeier

7

citations
Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture
2022 Plasma Sources Science and Technology article Engineering Metal and Thin Film Mechanics Open access

Matej Fekete, Michael Kröker, Pavel Souček, Peter Klein, Petr Vašina

2

citations
Durability of nanolayer Ti–Al–O–N hard coatings under simulated polycarbonate melt processing conditions
2021 Journal of Physics D Applied Physics article Engineering Metal and Thin Film Mechanics

T. Brögelmann, Kirsten Bobzin, Guido Grundmeier, Teresa de los Arcos, N.C. Kruppe, Sabrina Schwiderek, +1 more

1

citations
Methodology for the identification and implementation of application specific intensity distributions for material processing with laser radiation
2020 Fraunhofer-Publica (Fraunhofer-Gesellschaft) dissertation Engineering Laser Material Processing Techniques Open access

Annika Bonhoff

0

citations
Simulation of melt film dynamics in laser fusion cutting using a boundary layer approximation
2021 International Journal of Heat and Mass Transfer article Engineering Laser Material Processing Techniques Open access

Ulrich Halm, Markus Nießen, Wolfgang Schulz

16

citations
Influence of the etching process on the coating performance in dry tribological contacts
2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

2

citations
Studies on Protective Coatings for Molding Tools Applied in a Precision Glass Molding Process for a High Abbe Number Glass S-FPM3
2023 Coatings article Engineering Metal and Thin Film Mechanics Open access

Chong Chen, Marcel Friedrichs, Cheng Jiang, Liang Wang, Ming-Yang Dang, Tim Grunwald, +2 more

5

citations
A study on the microstructure formation mechanisms and functional properties of new β-FeSi₂-based polycrystalline thin films for photovoltaic applications using correlative electron microscopy
2025 RWTH Publications (RWTH Aachen) dissertation Physics and Astronomy Semiconductor materials and interfaces Open access

0

citations
Temporally-resolved decomposition of Ti0.12Al0.21B0.67 thin films at 1000 °C
2024 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Amir Hossein Navidi Kashani, Sebastian Lellig, Marcus Hans, Lukas Löfler, Stanislav Mráz, Arnold Milenko Müller, +3 more

4

citations
Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Films
2022 Materials article Engineering Metallic Glasses and Amorphous Alloys Open access

Michael K. Steinhoff, Damian M. Holzapfel, Soheil Karimi Aghda, Deborah Neuß, P. Pöllmann, Marcus Hans, +3 more

3

citations
In search for non precious metal oxide electrodes with the case of BaMoO3 thin films for hydrogen evolution reaction
2025 Scientific Reports article Energy Electrocatalysts for Energy Conversion Open access

Phu Tran Phong Le, Vadim Ratovskii, Anja Bieberle‐Hütter, Gertjan Koster, Christoph Baeumer

3

citations