Residual stress measurement of physical vapor deposition (PVD) AlTiN thin films - a comparative study of x-Ray diffraction-, Raman spectroscopic and ring core method

The International Journal of Advanced Manufacturing Technology, vol. 144, pp. 7317–7332

Abstract

Abstract Cutting inserts experience substantial mechanical and thermal loads during machining. Hard thin-film coatings are widely applied to enhance performance and durability, but their residual stresses critically affect adhesion, stability, and tool life. Common stress determination methods include X-ray diffraction (sin²ψ; V m; XRD = 1.3–2.6 mm×3.7 μm), focused ion beam-digital image correlation (FIB-DIC) ring core method ( V m; FIB/DIC = 10 μm×3.7 μm), and Raman spectroscopy ( V m; Raman = 1 μm×40 nm), each deviating in measured volume ( V m = spot size × depth). Our comparative study examines different instrumentation, analysis tools, and applied methods for evaluating residual stresses in physical vapor deposition (PVD)-coated carbide inserts. Results disclose varying susceptibilities depending on thin film characteristics such as thickness, film-substrate interface, texture, chemical and residual stress gradients, highlighting differences in information depth and sensitivity. The study provides a good overview of laboratory methods for determining residual stresses in PVD coating. The sin²ψ-method provides reproducible residual stress states that are independent of varying instruments or analytical methods, including calibrants, radiation, different optics, detectors and even evaluated reflections and are more strongly affected by texture and residual stress gradient. FIB-DIC and sin²ψ method consider the entire cross-section and agree well. FIB-DIC offers higher spatial resolution and is more sensitive to nonuniform chemical influences. In Raman spectroscopy, the bond strength is affected by chemical gradients, among other factors, necessitating an elaborate calibration. Its low penetration depth of a few nanometers and the small spot size cause deviations in the studied heterogeneous thin films.

Authors 16

1. Hilke Petersen corresponding

   Leibniz University Hannover

   Affiliation as printed

   Institute of Production Engineering and Machine Tools (IFW), Leibniz University, An der Universität 2, 30823, Hanover, Garbsen, Germany

2. Arnd Heckemeyer

   Leibniz University Hannover

   Affiliation as printed

   Institute of Production Engineering and Machine Tools (IFW), Leibniz University, An der Universität 2, 30823, Hanover, Garbsen, Germany

3. Bernd Breidenstein

   Leibniz University Hannover

   Affiliation as printed

   Institute of Production Engineering and Machine Tools (IFW), Leibniz University, An der Universität 2, 30823, Hanover, Garbsen, Germany

4. Christoph Kahra

   Leibniz University Hannover

   Affiliation as printed

   Material Science Tools (IW), Leibniz University Hanover, An der Universität 2, 30823, Garbsen, Germany

5. Sebastian Herbst

   Leibniz University Hannover

   Affiliation as printed

   Material Science Tools (IW), Leibniz University Hanover, An der Universität 2, 30823, Garbsen, Germany

6. Finn Rümenapf

   TU Dortmund University

   Affiliation as printed

   Institute of Materials Engineering, TU Dortmund University, Leonhard-Euler-Straße 2, 44227, Dortmund, Germany

7. Nelson Filipe Lopes Dias

   TU Dortmund University

   Affiliation as printed

   Institute of Materials Engineering, TU Dortmund University, Leonhard-Euler-Straße 2, 44227, Dortmund, Germany

8. Nils Denkmann

   TU Dortmund University

   Affiliation as printed

   Experimental Physics 2, TU Dortmund University, Otto-Hahn-Straße 4a, 44227, Dortmund, Germany

9. Muhammad Tayyab Aachen Surface Engineering Institute (IOT)

   RWTH Aachen University

   Affiliation as printed

   Surface Engineering Institute, RWTH Aachen University, Kackertstraße 15, 52072, Aachen, Germany

10. Benjamin Bergmann

    Leibniz University Hannover

    Affiliation as printed

    Institute of Production Engineering and Machine Tools (IFW), Leibniz University, An der Universität 2, 30823, Hanover, Garbsen, Germany

11. Kai Donnerbauer

    TU Dortmund University

    Affiliation as printed

    Chair of Materials Test Engineering (WPT), TU Dortmund University, Baroper Str. 303, 44227, Dortmund, Germany

12. Frank Walther

    TU Dortmund University

    Affiliation as printed

    Chair of Materials Test Engineering (WPT), TU Dortmund University, Baroper Str. 303, 44227, Dortmund, Germany

13. Wolfgang Tillmann

    TU Dortmund University

    Affiliation as printed

    Institute of Materials Engineering, TU Dortmund University, Leonhard-Euler-Straße 2, 44227, Dortmund, Germany

14. Jörg Debus

    TU Dortmund University

    Affiliation as printed

    Experimental Physics 2, TU Dortmund University, Otto-Hahn-Straße 4a, 44227, Dortmund, Germany

15. Hans Jürgen Maier

    Leibniz University Hannover

    Affiliation as printed

    Material Science Tools (IW), Leibniz University Hanover, An der Universität 2, 30823, Garbsen, Germany

16. Kirsten Bobzin Aachen Surface Engineering Institute (IOT)

    RWTH Aachen University

    Affiliation as printed

    Surface Engineering Institute, RWTH Aachen University, Kackertstraße 15, 52072, Aachen, Germany