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Residual stress measurement of physical vapor deposition (PVD) AlTiN thin films - a comparative study of x-Ray diffraction-, Raman spectroscopic and ring core method2026 The International Journal of Advanced Manufacturing Technology article Engineering Metal and Thin Film Mechanics Open access
Hilke Petersen, Arnd Heckemeyer, Bernd Breidenstein, Christoph Kahra, Sebastian Herbst, Finn Rümenapf, +10 more
1citations
3 results