September 24, 2014 article Size effect of Young's modulus in AlN thin layers Journal of Applied Physics DOI: 10.1063/1.4896496 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 19 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Residual stress measurement of physical vapor deposition (PVD) AlTiN thin films - a comparative study of x-Ray diffraction-, Raman spectroscopic and ring core method 2026 The International Journal of Advanced Manufacturing Technology article Engineering Metal and Thin Film Mechanics Open access 1 citations 1 result References 0