Towards wafer-scale 2D material sensors
2D Materials, vol. 12, pp. 023002
Abstract
Abstract The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.
Authors 25
-
Delft University of Technology
Affiliation as printed
Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
-
VTT Technical Research Centre of Finland
Affiliation as printed
VTT Technical Research Centre of Finland Ltd, PO Box 1000, FI-02044 VTT Espoo, Finland
-
Affiliation as printed
Infineon Technologies AG, Wernerwerkstraße 2, 93049 Regensburg, Germany
-
Affiliation as printed
Institute of Physics, University of Tartu, W. Ostwald Street 1, 50411 Tartu, Estonia
-
Delft University of Technology
Affiliation as printed
Microelectronics Department, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
-
Delft University of Technology
Affiliation as printed
Microelectronics Department, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
-
Affiliation as printed
Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
-
Affiliation as printed
AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
-
Delft University of Technology
Affiliation as printed
Kavli Institute of Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
-
Institut Català de Nanociència i Nanotecnologia · Barcelona Institute of Science and Technology
Affiliation as printed
Nanobioelectronics & Biosensors Group, Institut Català de Nanociència i Nanotecnologia (ICN2), CSIC and the Barcelona Institute of Science and Technology (BIST), Campus UAB, Bellaterra, 08193 Barcelona, Spain
-
Universität der Bundeswehr München
Affiliation as printed
Institute of Physics & SENS Research Centre, University of the Bundeswehr Munich (UniBw M), Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany
-
Infineon Technologies (Germany)
Affiliation as printed
Infineon Technologies AG, Am Campeon 1-15, 85579 Neubiberg, Germany
-
Infineon Technologies (Germany)
Affiliation as printed
Infineon Technologies AG, Am Campeon 1-15, 85579 Neubiberg, Germany
-
Infineon Technologies (Germany)
Affiliation as printed
Infineon Technologies AG, Am Campeon 1-15, 85579 Neubiberg, Germany
-
Delft University of Technology
Affiliation as printed
Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
-
Delft University of Technology
Affiliation as printed
Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
-
Korea University · Delft University of Technology
Affiliation as printed
Department of Electronics and Information Engineering, Korea University, Sejong-ro 2511, Sejong 30019, Republic of Korea
Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
-
Philipps University of Marburg
Affiliation as printed
Department of Physics, Philipps-Universität Marburg, Marburg, Germany
-
VTT Technical Research Centre of Finland
Affiliation as printed
VTT Technical Research Centre of Finland Ltd, PO Box 1000, FI-02044 VTT Espoo, Finland
-
Affiliation as printed
Graphenea, Paseo Mikeletegi 83, 20009 San Sebastián, Spain
-
Affiliation as printed
Graphenea, Paseo Mikeletegi 83, 20009 San Sebastián, Spain
-
Delft University of Technology
Affiliation as printed
Kavli Institute of Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
-
Institució Catalana de Recerca i Estudis Avançats · Institut Català de Nanociència i Nanotecnologia · Barcelona Institute of Science and Technology
Affiliation as printed
ICREA Institució Catalana de Recerca i Estudis Avançats, Passeig de Lluís Companys, 23, 08010 Barcelona, Spain
Nanobioelectronics & Biosensors Group, Institut Català de Nanociència i Nanotecnologia (ICN2), CSIC and the Barcelona Institute of Science and Technology (BIST), Campus UAB, Bellaterra, 08193 Barcelona, Spain
-
Universität der Bundeswehr München
Affiliation as printed
Institute of Physics & SENS Research Centre, University of the Bundeswehr Munich (UniBw M), Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany
-
AMO (Germany) · RWTH Aachen University
Affiliation as printed
AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
Cited by 13 stored of 13
13 results
No patents citing this paper on Lens.org (checked 2026-10-06).