May 28, 2015 article Open access Integrating MEMS and ICs Microsystems & Nanoengineering DOI: 10.1038/micronano.2015.5 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 367 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Towards wafer-scale 2D material sensors 2025 2D Materials article Materials Science Graphene research and applications Open access 13 citations Release of hydrogen gas from PECVD silicon nitride thin films in cavities of MEMS sensors 2024 Micro and Nano Engineering article Engineering Advanced MEMS and NEMS Technologies Open access 5 citations Vehicle Surroundings Perception Using Micro‐electromechanical Systems Inertial Sensors 2024 Advanced Intelligent Systems article Computer Science Context-Aware Activity Recognition Systems Open access 0 citations 3 results References 0