Correlative microscopy and techniques with atom probe tomography: Opportunities in materials science

MRS Bulletin, vol. 47, pp. 680–687

Abstract

Abstract In the last decade, the applicability of atom probe tomography (APT) has been strongly extended from highly conductive materials such as metals and alloys to semiconductors and insulators as well as to more sophisticated systems. However, atom probe tomography can only provide information about composition for most of these complex materials, while the correlation between composition and other material properties such as structural, functional, and mechanical properties remains challenging to be analyzed by APT alone. Therefore, various groups worldwide have put notable efforts recently in combining APT with other microscopy methods and techniquesex situandin situwith the goal to understand the composition–property interrelationships at the same position of the sample. Hence, the present work not only provides a short overview of such works, but also describes three short examples of possible opportunities in materials science when using correlative microscopy and techniques with atom probe tomography. Graphical abstract

Authors 2

1. Oana Cojocaru‐Mirédin corresponding Aachen I. Institute of Physics (IA)

   RWTH Aachen University

   Affiliation as printed

   I. Institute of Physics, RWTH Aachen University, Aachen, Germany

2. Arun Devaraj

   Pacific Northwest National Laboratory

   Affiliation as printed

   Pacific Northwest National Laboratory, Richland, USA