November 08, 2017 article Probing the electron density in HiPIMS plasmas by target inserts Journal of Physics D Applied Physics DOI: 10.1088/1361-6463/aa9914 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 28 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride 2022 Thin Solid Films article Engineering Plasma Diagnostics and Applications 8 citations 1 result References 0