April 01, 2005 article Spatial electron density distribution in a high-power pulsed magnetron discharge IEEE Transactions on Plasma Science DOI: 10.1109/tps.2005.845022 OpenAlex Authors 0 Author list not loaded yet. Cited by 2 stored of 119 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride 2022 Thin Solid Films article Engineering Plasma Diagnostics and Applications 8 citations Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition 2020 Journal of Applied Physics article Engineering Metal and Thin Film Mechanics Open access cited by 2 patents 72 citations 2 results References 0