August 01, 2024 conference-paper Open access Modeling and simulation of the capacitive NEMS pressure sensor based on suspended graphene membranes Journal of Physics Conference Series DOI: 10.1088/1742-6596/2809/1/012003 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 1 References 3 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Nanoelectromechanical Sensors Based on Suspended 2D Materials 2020 Research article Engineering Advanced MEMS and NEMS Technologies Open access 175 citations Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications 2020 Microsystems & Nanoengineering article Engineering Advanced MEMS and NEMS Technologies Open access cited by 1 patent 90 citations A Resonant Graphene NEMS Vibrometer 2022 Small article Engineering Advanced MEMS and NEMS Technologies Open access 25 citations 3 results