An Array of On-Chip Integrated, Individually Addressable Capacitive Field-Effect Sensors with Control Gate: Design and Modelling

Sensors, vol. 21, pp. 6161

Abstract

The on-chip integration of multiple biochemical sensors based on field-effect electrolyte-insulator-semiconductor capacitors (EISCAP) is challenging due to technological difficulties in realization of electrically isolated EISCAPs on the same Si chip. In this work, we present a new simple design for an array of on-chip integrated, individually electrically addressable EISCAPs with an additional control gate (CG-EISCAP). The existence of the CG enables an addressable activation or deactivation of on-chip integrated individual CG-EISCAPs by simple electrical switching the CG of each sensor in various setups, and makes the new design capable for multianalyte detection without cross-talk effects between the sensors in the array. The new designed CG-EISCAP chip was modelled in so-called floating/short-circuited and floating/capacitively-coupled setups, and the corresponding electrical equivalent circuits were developed. In addition, the capacitance-voltage curves of the CG-EISCAP chip in different setups were simulated and compared with that of a single EISCAP sensor. Moreover, the sensitivity of the CG-EISCAP chip to surface potential changes induced by biochemical reactions was simulated and an impact of different parameters, such as gate voltage, insulator thickness and doping concentration in Si, on the sensitivity has been discussed.

Authors 4

1. Arshak Poghossian corresponding
   Affiliation as printed

   MicroNanoBio, Liebigstr. 4, 40479 Düsseldorf, Germany

2. Rene Welden Aachen Institute of Nano- and Biotechnologies (INB)

   KU Leuven · FH Aachen

   Affiliation as printed

   Institute of Nano- and Biotechnologies (INB), FH Aachen, Campus Jülich, Heinrich-Mußmannstr. 1, 52428 Jülich, Germany

   Laboratory for Soft Matter and Biophysics, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium

3. V.V. Buniatyan

   National Polytechnic University of Armenia

   Affiliation as printed

   Department of Microelectronics and Biomedical Devices, National Polytechnic University of Armenia (NPUA), 105 Teryan St., NPUA, Yerevan 0009, Armenia

4. Michael Josef Schöning corresponding Aachen Institute of Nano- and Biotechnologies (INB)

   Forschungszentrum Jülich · FH Aachen

   Affiliation as printed

   Institute of Biological Information Processing (IBI-3), Forschungszentrum Jülich, 52425 Jülich, Germany

   Institute of Nano- and Biotechnologies (INB), FH Aachen, Campus Jülich, Heinrich-Mußmannstr. 1, 52428 Jülich, Germany