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Erosion behavior of Y 2 O 3 in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation2020 Journal of the American Ceramic Society article Engineering Plasma Diagnostics and Applications Open access cited by 1 patent
Moritz Kindelmann, Mark Stamminger, Nino Schön, Marcin Rasinski, Rüdiger‐A. Eichel, Florian Hausen, +2 more
46citations -
Processing map to control the erosion of Y 2 O 3 in fluorine based etching plasmas2022 Journal of the American Ceramic Society article Engineering Plasma Diagnostics and Applications Open access
Moritz Kindelmann, Moritz Lukas Weber, Mark Stamminger, Rahel Buschhaus, Uwe Breuer, Martin Bram, +1 more
29citations -
The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas2021 Journal of the European Ceramic Society article Engineering Plasma Diagnostics and Applications
Moritz Kindelmann, Moritz Lukas Weber, Mark Stamminger, Rahel Buschhaus, E. Wessel, Martin Bram, +1 more
24citations -
Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction2023 Plasma Sources Science and Technology article Engineering Plasma Diagnostics and Applications Open access
Joel Fischer, Max Renner, Jón Tómas Guðmundsson, Martin Rudolph, Hamidreza Hajihoseini, N. Brenning, +1 more
21citations -
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth2023 Plasma Processes and Polymers article Engineering Plasma Diagnostics and Applications Open access
Teresa de los Arcos, Peter Awakowicz, Jan Benedikt, Beatrix Biskup, Marc Böke, Nils Boysen, +14 more
20citations -
Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges2023 Journal of Vacuum Science & Technology A Vacuum Surfaces and Films article Engineering Plasma Diagnostics and Applications Open access
Max Renner, Joel Fischer, Hamidreza Hajihoseini, Jón Tómas Guðmundsson, Martin Rudolph, Daniel Lundin
19citations -
Correlative characterization of plasma etching resistance of various aluminum garnets2024 Journal of the American Ceramic Society article Engineering Plasma Diagnostics and Applications Open access
Christian Stern, Christian Günter Georg Schwab, Moritz Kindelmann, Mark Stamminger, Thomas E. Weirich, Inhee Park, +4 more
12citations -
Spectroscopic study of ballast resistance on the Supersonically Expanding Argon using a Micrometer Hollow Cathode Discharge2023 International Vacuum Electronics Conference (IVEC) conference-paper Engineering Plasma Diagnostics and Applications
Yu Gu, Nicolas Suas-David, Jordy Bouwman, Yongdong Li, H. Linnartz
2citations