From

Institution

Field

Type

Journal / venue: Thin Solid Films ×

Open access only Cited by patents (Lens) Include non-Aachen papers (citing/cited)

Reset

Papers 13

Sort: Cited Newest Oldest Fwci Patents ⇩ CSV

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics cited by 2 patents

Kirsten Bobzin, T. Brögelmann, N.C. Kruppe, Martin Engels

12

citations
Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes
2023 Thin Solid Films article Engineering Plasma Diagnostics and Applications cited by 1 patent

Kirsten Bobzin, C. Kalscheuer, M. Carlet, Julia Janowitz

11

citations
Correlation of thermal characteristics and microstructure of multilayer electron beam physical vapor deposition thermal barrier coatings
2020 Thin Solid Films article Engineering High-Temperature Coating Behaviors

Kirsten Bobzin, T. Brögelmann, C. Kalscheuer, Martin Welters

10

citations
Competition between V2O3 phases deposited by one-step reactive sputtering process on polycrystalline conducting electrode
2020 Thin Solid Films article Materials Science Transition Metal Oxide Nanomaterials Open access

Jonathan A. J. Rupp, Étienne Janod, Marie‐Paule Besland, B. Corraze, Andreas Kindsmüller, Madec Querré, +5 more

10

citations
From cathode to substrate: Plasma diagnostics on high power pulsed magnetron sputtering deposition of titanium nitride
2022 Thin Solid Films article Engineering Plasma Diagnostics and Applications

Kirsten Bobzin, C. Kalscheuer, M. Carlet

8

citations
Rapid thermal sintering of screen-printed LiCoO2 films
2022 Thin Solid Films article Engineering Advancements in Battery Materials

Walter Sebastian Scheld, Sandra Lobe, Sven Uhlenbruck, Christian Dellen, Yoo Jung Sohn, Linda Charlotte Hoff, +3 more

7

citations
Evaluation of the membrane performance of ultra-smooth silicon organic coatings depending on the process energy density
2022 Thin Solid Films article Engineering Membrane Separation and Gas Transport

Lara Kleines, Stefan Wilski, Philipp Alizadeh, Jens Rubner, Matthias Weßling, Christian Hopmann, +1 more

7

citations
Resolving the microstructure of aluminum-doped zinc oxide thin films grown on different silicon heterojunction solar cell structures by advanced transmission electron microscopy
2025 Thin Solid Films article Engineering Thin-Film Transistor Technologies Open access

Sara Alkhereibi, Muhammad Ainul Yaqin, Alexander Eberst, Binbin Xu, Janghyun Jo, Husain Rashad Alsamamra, +4 more

6

citations
Structural analyses of a CrN/AlN nanolaminate hard coating after nanoscratch test
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, T. Brögelmann, Joachim Mayer, M.R. Iskandar, N.C. Kruppe

2

citations
Evaluation of anti-adhesive and corrosion protection properties of TiAlSiN-magnetron-sputtered films for applications in polymer processing
2025 Thin Solid Films article Engineering Metal and Thin Film Mechanics Open access

Chantal Theile‐Rasche, Fuzeng Wang, Tim Prüßner, Marten Huck, Hans‐Georg Steinrück, Teresa de los Arcos

2

citations
Spontaneous fluctuations in a plasma ion assisted deposition – correlation between deposition conditions and vanadium oxide thin film growth
2021 Thin Solid Films article Materials Science Transition Metal Oxide Nanomaterials Open access cited by 1 patent

Anna Frank, Stefan Werner Hieke, Angela Kruth, Christina Scheu

2

citations
Hybrid reactive sputtering of transition metal aluminum oxynitrides
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

1

citations
Gold silicide formation and preferential grain boundary etching of gold by quartz deposition and removal
2026 Thin Solid Films article Physics and Astronomy Semiconductor materials and interfaces Open access

Douwe Scholma, Marcel J. Rost

0

citations

13 results