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Papers matching “reactive sputtering” 33

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Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering
2024 Advanced Healthcare Materials article Neuroscience Neuroscience and Neural Engineering Open access

Maciej Gryszel, Marie Jakešová, Xuan Thang Vu, Sven Ingebrandt, Eric Daniel Głowacki

3

citations
Competition between V2O3 phases deposited by one-step reactive sputtering process on polycrystalline conducting electrode
2020 Thin Solid Films article Materials Science Transition Metal Oxide Nanomaterials Open access

Jonathan A. J. Rupp, Étienne Janod, Marie‐Paule Besland, B. Corraze, Andreas Kindsmüller, Madec Querré, +5 more

10

citations
Hybrid reactive sputtering of transition metal aluminum oxynitrides
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

1

citations
Pulsed DC Sputter Deposition of Stable Turbostratic Boron Nitride Thin Films
2026 Advanced Materials Interfaces article Materials Science Boron and Carbon Nanomaterials Research Open access

Josef Schätz, Michael Krenzer, T. Schaffus, Martin Otto, Fabian Kühnel, Fabian Streb, +4 more

1

citations
Efficient Flexible All-Solid Supercapacitors with Direct Sputter-Grown Needle-Like Mn/MnOx@Graphite-Foil Electrodes and PPC-Embedded Ionic Electrolytes
2020 Nanomaterials article Materials Science Supercapacitor Materials and Fabrication Open access

Apurba Ray, Delale Korkut, Bilge Saruhan

42

citations
Tuning the Memory Window of TaOx ReRAM Using the RF Sputtering Power
2021 IEEE International Symposium on Circuits and Systems proceedings conference-paper Engineering Advanced Memory and Neural Computing

Wonjoo Kim, Dirk J. Wouters, Rainer M. Waser, Vikas Rana

6

citations
Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes
2023 Thin Solid Films article Engineering Plasma Diagnostics and Applications cited by 1 patent

Kirsten Bobzin, C. Kalscheuer, M. Carlet, Julia Janowitz

11

citations
Phase Evolution, Structure and Mechanical Properties of CrHfMoTaW–N High-entropy Thin Films Deposited by Reactive HiPIMS
2026 SSRN Electronic Journal preprint Engineering High Entropy Alloys Studies Open access

Pavel Souček, Lukáš Vrána, Matej Fekete

0

citations
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm loss
2024 preprint Engineering Photonic and Optical Devices Open access

Max C. Lemme, Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian, Rijil Thomas, Lutz Kirste, +1 more

0

citations
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm loss
2024 preprint Engineering Photonic and Optical Devices Open access

Max C. Lemme, Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian, Rijil Thomas, Lutz Kirste, +1 more

0

citations
A Proposal for a Composite with Temperature-Independent Thermophysical Properties: HfV2–HfV2O7
2020 Materials article Materials Science Thermal Expansion and Ionic Conductivity Open access

Philipp Keuter, Anna L. Ravensburg, Marcus Hans, Soheil Karimi Aghda, Damian M. Holzapfel, Daniel Primetzhofer, +1 more

6

citations
Mechanical properties and thermal stability of reactively sputtered multi-principal-metal Hf-Ta-Ti-V-Zr nitrides
2020 Surface and Coatings Technology article Engineering High Entropy Alloys Studies Open access

A. Kirnbauer, A. Kretschmer, Tomasz Wójcik, V. Paneta, Marcus Hans, Jochen M. Schneider, +2 more

111

citations
Photochromic Mechanism and Dual‐Phase Formation in Oxygen‐Containing Rare‐Earth Hydride Thin Films
2020 Advanced Optical Materials article Materials Science Transition Metal Oxide Nanomaterials Open access cited by 1 patent

Marcus Hans, Tuan Thien Tran, Sigurbjörn M. Aðalsteinsson, Dmitrii Moldarev, Marcos V. Moro, Max Wolff, +1 more

35

citations
Titanium Nitride as a New Prospective Material for NanoSQUIDs and Superconducting Nanobridge Electronics
2021 Nanomaterials article Physics and Astronomy Superconducting and THz Device Technology Open access

Michael I. Faley, Rafal E. Dunin‐Borkowski

30

citations
Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
2021 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Soheil Karimi Aghda, Denis Mušić, Yeliz Unutulmazsoy, Heng Han Sua, Stanislav Mráz, Marcus Hans, +3 more

30

citations
Influence of moisture on the ferroelectric properties of sputtered hafnium oxide thin films
2023 Journal of Applied Physics article Engineering Ferroelectric and Negative Capacitance Devices Open access

Fenja Berg, Nils Kopperberg, Jan Lübben, Ilia Valov, Xiaochao Wu, Ulrich Simon, +1 more

4

citations
Superconducting Microstrip Losses at Microwave and Sub-millimeter wavelengths
2021 arXiv (Cornell University) preprint Physics and Astronomy Superconducting and THz Device Technology Open access

Sebastian Hähnle, Kevin Kouwenhoven, Bruno T. Buijtendorp, Akira Endo, K. Karatsu, David J. Thoen, +2 more

0

citations
Phase Formation and Thermal Stability of Reactively Sputtered YTaO4–ZrO2 Coatings
2021 Materials article Engineering High-Temperature Coating Behaviors Open access cited by 1 patent

Bastian Stelzer, Katrin Pingen, Marcus Hans, Damian M. Holzapfel, Silvia Richter, Joachim Mayer, +2 more

9

citations
Spinodal decomposition of reactively sputtered (V0.64Al0.36)0.49N0.51 thin films
2020 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Marcus Hans, Holger Rueß, Zsolt Czigány, Janina Krause, Pavel Ondračka, Denis Mušić, +4 more

15

citations
Control of stoichiometry and morphology in polycrystalline V2O3 thin films using oxygen buffers
2020 Journal of Materials Science article Materials Science Transition Metal Oxide Nanomaterials Open access

Jonathan A. J. Rupp, B. Corraze, Marie‐Paule Besland, Laurent Cario, Julien Tranchant, Dirk J. Wouters, +2 more

7

citations
Gold silicide formation and preferential grain boundary etching of gold by quartz deposition and removal
2026 Thin Solid Films article Physics and Astronomy Semiconductor materials and interfaces Open access

Douwe Scholma, Marcel J. Rost

0

citations
KEVION: An ion irradiation and sample analysis research facility for planetary science
2026 conference-abstract Physics and Astronomy Astro and Planetary Science Open access

C. A. Dukes, Adam K. Woodson, Robert E. Johnson, J. Terwisscha van Scheltinga, Jon F. Ihlefeld, Petra Reinke, +2 more

0

citations
Residual Stress Analysis in High‐Speed Physical Vapor Deposition Coatings
2024 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Max Philip Möbius, Parisa Hassanzadegan Aghdam

12

citations
Thermal stability and mechanical properties of sputtered (Hf,Ta,V,W,Zr)-diborides
2020 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access

A. Kirnbauer, Antonia Wagner, Vincent Moraes, Daniel Primetzhofer, M. Hans, Jochen M. Schneider, +2 more

90

citations
NanoSQUIDs based on Nb nanobridges
2020 Journal of Physics Conference Series conference-paper Physics and Astronomy Superconducting and THz Device Technology Open access

Michael I. Faley, Rafal E. Dunin‐Borkowski

11

citations