Papers matching “partially coherent light” 15
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Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: mask and illumination parameter optimization2024 Journal of Micro/Nanopatterning Materials and Metrology article Engineering Advancements in Photolithography Techniques Open access
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
0citations -
Investigation of the resolution limit of Talbot lithography with compact EUV exposure tools2023 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
2citations -
Towards the resolution limit of Talbot lithography with compact EUV exposure tools2022 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
1citations -
MusE GAs FLOw and Wind (MEGAFLOW) XIV: Background-Galaxy Absorption Reveals Kiloparsec-Scale Structure in the Cool Circumgalactic Medium2026 arXiv (Cornell University) preprint Physics and Astronomy Galaxies: Formation, Evolution, Phenomena Open access
Yucheng Guo, N. Bouché, Martin Wendt, Timothy M. Heckman, Joop Schaye, Sanchayeeta Borthakur, +6 more
0citations -
Multiscale relaxation dynamics and diffusion of myelin basic protein in solution studied by quasielastic neutron scattering2021 The Journal of Chemical Physics article Biochemistry, Genetics and Molecular Biology Protein Structure and Dynamics
Abir N. Hassani, Luman Haris, Markus Appel, Tilo Seydel, Andreas Maximilian Stadler, Gerald Reinhard Kneller
16citations -
Small-wedge synchrotron and serial XFEL datasets for Cysteinyl leukotriene GPCRs2020 Scientific Data data-paper Biochemistry, Genetics and Molecular Biology Receptor Mechanisms and Signaling Open access
Egor Marin, Aleksandra P. Luginina, Anastasiia Gusach, Kirill Kovalev, Sergey S. Bukhdruker, Polina A. Khorn, +7 more
8citations
15 results