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Papers matching “reactive sputtering” 14

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Hybrid reactive sputtering of transition metal aluminum oxynitrides
2021 Thin Solid Films article Engineering Metal and Thin Film Mechanics

Kirsten Bobzin, C. Kalscheuer, M. Carlet

1

citations
Machine learning based model for plasma prediction in high power pulsed magnetron sputtering processes
2023 Thin Solid Films article Engineering Plasma Diagnostics and Applications cited by 1 patent

Kirsten Bobzin, C. Kalscheuer, M. Carlet, Julia Janowitz

11

citations
Mechanical properties and thermal stability of reactively sputtered multi-principal-metal Hf-Ta-Ti-V-Zr nitrides
2020 Surface and Coatings Technology article Engineering High Entropy Alloys Studies Open access

A. Kirnbauer, A. Kretschmer, Tomasz Wójcik, V. Paneta, Marcus Hans, Jochen M. Schneider, +2 more

111

citations
Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
2021 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access cited by 1 patent

Soheil Karimi Aghda, Denis Mušić, Yeliz Unutulmazsoy, Heng Han Sua, Stanislav Mráz, Marcus Hans, +3 more

30

citations
Influence of moisture on the ferroelectric properties of sputtered hafnium oxide thin films
2023 Journal of Applied Physics article Engineering Ferroelectric and Negative Capacitance Devices Open access

Fenja Berg, Nils Kopperberg, Jan Lübben, Ilia Valov, Xiaochao Wu, Ulrich Simon, +1 more

4

citations
Phase Formation and Thermal Stability of Reactively Sputtered YTaO4–ZrO2 Coatings
2021 Materials article Engineering High-Temperature Coating Behaviors Open access cited by 1 patent

Bastian Stelzer, Katrin Pingen, Marcus Hans, Damian M. Holzapfel, Silvia Richter, Joachim Mayer, +2 more

9

citations
Spinodal decomposition of reactively sputtered (V0.64Al0.36)0.49N0.51 thin films
2020 Surface and Coatings Technology article Engineering Metal and Thin Film Mechanics Open access

Marcus Hans, Holger Rueß, Zsolt Czigány, Janina Krause, Pavel Ondračka, Denis Mušić, +4 more

15

citations
Residual Stress Analysis in High‐Speed Physical Vapor Deposition Coatings
2024 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics Open access

Kirsten Bobzin, C. Kalscheuer, Max Philip Möbius, Parisa Hassanzadegan Aghdam

12

citations
Thermal stability and mechanical properties of sputtered (Hf,Ta,V,W,Zr)-diborides
2020 Acta Materialia article Engineering Metal and Thin Film Mechanics Open access

A. Kirnbauer, Antonia Wagner, Vincent Moraes, Daniel Primetzhofer, M. Hans, Jochen M. Schneider, +2 more

90

citations
Designing Defect Structure and Interfacial Strain in an Epitaxial VN Bilayer Film by Tailoring N Concentration
2026 Advanced Materials Interfaces article Engineering Metal and Thin Film Mechanics Open access

Marcus Hans, Damian M. Holzapfel, Soheil Karimi Aghda, Michal Fečík, Daniel Primetzhofer, Zaoli Zhang, +1 more

0

citations
Cutting performance of Al₂O₃ coatings deposited by High Speed PVD
2025 Surface and Coatings Technology article Engineering Advanced machining processes and optimization Open access

Kirsten Bobzin, Max Philip Möbius, Parisa Aghdam Tönnißen

6

citations
Influence of carbon on microstructure and mechanical properties of magnetron sputtered TaW coatings
2020 Materials & Design article Engineering Metal and Thin Film Mechanics Open access

Stefan Fritze, Marcus Hans, Lars Riekehr, Barbara Osinger, Erik Lewin, Jochen M. Schneider, +1 more

15

citations
Microstructure, mechanical properties, thermal decomposition and oxidation sequences of crystalline AlB2 thin films
2025 Materials & Design article Engineering Metal and Thin Film Mechanics Open access

Chun Hu, Stanislav Mráz, Tomasz Wójcik, Maximilian Podsednik, Balint Istvan Hajas, Andreas Limbeck, +3 more

5

citations
Interface-controlled defect engineering in TiN/TaN superlattices for enhanced hardness and fracture toughness
2026 Materials & Design article Engineering Metal and Thin Film Mechanics Open access

Zecui Gao, Qimin Wang, Julian Buchinger, Nikola Koutná, Marcus Hans, Zaoli Zhang, +3 more

0

citations

14 results