Papers matching “compact radiation source” 11
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Broadband reflective spectrometer for high-resolution spectral characterization of radiation sources2024 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Calibration and Measurement Techniques
Ismael Gisch, Sophia Schröder, Sven Glabisch, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, +1 more
1citations -
Towards the resolution limit of Talbot lithography with compact EUV exposure tools2022 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
1citations -
Investigation of the resolution limit of Talbot lithography with compact EUV exposure tools2023 European Mask and Lithography Conference (EMLC) conference-paper Engineering Advancements in Photolithography Techniques
Bernhard Lüttgenau, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Carlo Holly
2citations -
Development of an ultra-compact inline transmission grating spectrograph for extreme ultraviolet wavelengths2023 International Conference on Extreme Ultraviolet Lithography conference-paper Engineering Advancements in Photolithography Techniques
Sascha Brose, Serhiy Danylyuk, Bernhard Lüttgenau, Ismael Gisch, Lars Lohmann, Jochen Stollenwerk, +1 more
1citations -
Investigation of Curle's Dipolar Sources on a Porous Airfoil Interacting with Incoming Turbulence2022 AIAA/CEAS Aeroacoustics Conference conference-paper Engineering Aerodynamics and Acoustics in Jet Flows Open access
Riccardo Zamponi, Sutharsan Satcunanathan, Stéphane Moreau, Matthias H. Meinke, Wolfgang Schröeder, Christophe F. Schram
0citations -
Effect of porosity on Curle’s dipolar sources on an aerofoil in turbulent flow2022 Journal of Sound and Vibration article Engineering Aerodynamics and Acoustics in Jet Flows Open access
Riccardo Zamponi, Sutharsan Satcunanathan, Stéphane Moreau, Matthias H. Meinke, Wolfgang Schröder, Christophe F. Schram
23citations -
Investigation of stochastic roughness effects for nanoscale grating characterization with a stand-alone EUV spectrometer2022 SPIE Photomask Technology Conference conference-paper Engineering Advancements in Photolithography Techniques
Sven Glabisch, Sophia Schröder, Sascha Brose, Henning Heiming, Jochen Stollenwerk, Carlo Holly
1citations
11 results