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Influence of Metal–Organic Chemical Vapor Deposition MoS2 Material Properties on Memristor Resistance State and Switching Voltage Variability

ACS Applied Electronic Materials

Abstract

Abstract Two-dimensional (2D) materials are promising resistive switching materials for vertical memristors due to their ultimate thinness and low-power operation. However, high electrical variability remains a challenge, and reducing it through materials engineering remains largely unexplored. Here, we investigate how the properties of 2D multilayer molybdenum disulfide (MoS2), grown by metal–organic chemical vapor deposition (MOCVD), influence variability in memristors with metal electrodes. Two MoS2 batches were prepared under different MOCVD growth conditions, resulting in distinct surface roughness and grain sizes. Devices based on smoother, more uniform MoS2 with larger grains exhibited significantly reduced electrical variability. Based on established grain-boundary-assisted filament models, the larger crystallites provide a plausible explanation for the reduced variability, although the contributions of individual material properties cannot be separated in the present comparison. More than 60 devices per batch were tested, providing a robust statistical basis. These results show that optimizing MoS2 grain size and uniformity can improve memristor reliability and highlight the potential of MOCVD as el6c01424_toca scalable route toward improved statistical uniformity in MoS2 films.

Authors 19

  1. Dennis Braun Aachen

    RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

  2. Jing Liu Aachen

    RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

  3. Poonam Devi Aachen

    RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

  4. RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Ahornstr. 55 , ,

  5. Blumenthal Foundation

    Affiliation as printed

    AMO GmbH, Advanced Microelectronic Center Aachen , Otto-Blumenthal-Str. 25 , ,

  6. Lukas Völkel Aachen

    RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

  7. Affiliation as printed

    Compound Semiconductor Technology (CST), RWTH Aachen University , Sommerfeldstr. 18 , ,

  8. Jimin Lee Aachen

    RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

  9. Sofía Cruces Aachen

    RWTH Aachen University

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

  10. Affiliation as printed

    Compound Semiconductor Technology (CST), RWTH Aachen University , Sommerfeldstr. 18 , ,

  11. Affiliation as printed

    Compound Semiconductor Technology (CST), RWTH Aachen University , Sommerfeldstr. 18 , ,

  12. Ke Ran Aachen

    RWTH Aachen University · Forschungszentrum Jülich · Blumenthal Foundation

    Affiliation as printed

    AMO GmbH, Advanced Microelectronic Center Aachen , Otto-Blumenthal-Str. 25 , ,

    Forschungszentrum Jülich , , ,

    RWTH Aachen University , , Ahornstr. 55 , ,

  13. Blumenthal Foundation

    Affiliation as printed

    AMO GmbH, Advanced Microelectronic Center Aachen , Otto-Blumenthal-Str. 25 , ,

  14. Affiliation as printed

    Compound Semiconductor Technology (CST), RWTH Aachen University , Sommerfeldstr. 18 , ,

  15. Affiliation as printed

    Compound Semiconductor Technology (CST), RWTH Aachen University , Sommerfeldstr. 18 , ,

  16. Joachim Mayer Aachen

    RWTH Aachen University · Forschungszentrum Jülich

    Affiliation as printed

    Forschungszentrum Jülich , , ,

    RWTH Aachen University , , Ahornstr. 55 , ,

  17. Affiliation as printed

    AIXTRON SE , Dornkaulstr. 2 , ,

    Compound Semiconductor Technology (CST), RWTH Aachen University , Sommerfeldstr. 18 , ,

  18. Alwin Daus Aachen

    RWTH Aachen University · University of Stuttgart

    Affiliation as printed

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

    University of Stuttgart , , Pfaffenwaldring 47 , ,

  19. Max C. Lemme Aachen

    RWTH Aachen University · Blumenthal Foundation

    Affiliation as printed

    AMO GmbH, Advanced Microelectronic Center Aachen , Otto-Blumenthal-Str. 25 , ,

    RWTH Aachen University , , Otto-Blumenthal-Str. 25 , ,

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References 65