August 01, 2026 article Intelligent run-to-run control of semiconductor manufacturing processes using deep reinforcement learning enabled sliding mode observer Neural Computing and Applications DOI: 10.1007/s00521-026-12331-5 OpenAlex Authors 0 Author list not loaded yet. Cited by 0 stored of 0 References 1 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Model-based Reinforcement Learning: A Survey 2023 Foundations and Trends® in Machine Learning article Computer Science Reinforcement Learning in Robotics Open access cited by 2 patents 530 citations 1 result