High yield, low disorder Si/SiGe heterostructures for spin qubit devices manufactured in a BiCMOS pilot line

Applied Physics Letters, vol. 127

Abstract

The prospect of achieving fault-tolerant quantum computing with semiconductor spin qubits in Si/SiGe heterostructures relies on the integration of a large number of identical devices, a feat achievable through a scalable (Bi)CMOS manufacturing approach. To this end, both the gate stack and the Si/SiGe heterostructure must be of high quality, exhibiting uniformity across the wafer and consistent performance across multiple fabrication runs. Here, we report a comprehensive investigation of Si/SiGe heterostructures and gate stacks, fabricated in an industry-standard 200 mm BiCMOS pilot line. We evaluate the homogeneity and reproducibility by probing the properties of the two-dimensional electron gas (2DEG) in the shallow silicon quantum well through magnetotransport characterization of Hall bar-shaped field-effect transistors at 1.5 K. Across all the probed wafers, we observe minimal variation of the 2DEG properties, with an average maximum mobility of (4.25±0.17)×105 cm2/Vs and low percolation carrier density of (5.9±0.18)×1010 cm−2 evidencing low disorder potential in the quantum well. The observed narrow statistical distribution of the transport properties highlights the reproducibility and the stability of the fabrication process. Furthermore, wafer-scale characterization of a selected individual wafer evidenced the homogeneity of the device performances across the wafer area. Based on these findings, we conclude that our material and processes provide a suitable platform for the development of scalable, Si/SiGe-based quantum devices.

Authors 16

1. Alberto Mistroni

   Leibniz Institute for High Performance Microelectronics

   Affiliation as printed

   IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

2. Marco Lisker

   Leibniz Institute for High Performance Microelectronics

   Affiliation as printed

   IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

3. Yuji Yamamoto

   Leibniz Institute for High Performance Microelectronics

   Affiliation as printed

   IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

4. Wei-Chen Wen

   Leibniz Institute for High Performance Microelectronics

   Affiliation as printed

   IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

5. F. Fidorra

   Leibniz Institute for High Performance Microelectronics

   Affiliation as printed

   IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

6. H. Tetzner

   Leibniz Institute for High Performance Microelectronics

   Affiliation as printed

   IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

7. Laura K. Diebel

   University of Regensburg

   Affiliation as printed

   Fakultät für Physik, Universität Regensburg 2 , Regensburg 93040,

8. Lino Visser Aachen JARA-FIT Institute for Quantum Information

   RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

   Affiliation as printed

   JARA-FIT Institute for Quantum Information, Forschungszentrum Jülich GmbH and RWTH Aachen University 3 , 52062 Aachen,

9. Spandan Anupam Aachen JARA-FIT Institute for Quantum Information

   RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

   Affiliation as printed

   JARA-FIT Institute for Quantum Information, Forschungszentrum Jülich GmbH and RWTH Aachen University 3 , 52062 Aachen,

10. Vincent Mourik Aachen JARA-FIT Institute for Quantum Information

    RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

    Affiliation as printed

    JARA-FIT Institute for Quantum Information, Forschungszentrum Jülich GmbH and RWTH Aachen University 3 , 52062 Aachen,

11. Lars R. Schreiber Aachen JARA-FIT Institute for Quantum Information

    RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

    Affiliation as printed

    ARQUE Systems GmbH 4 , 52074 Aachen,

    JARA-FIT Institute for Quantum Information, Forschungszentrum Jülich GmbH and RWTH Aachen University 3 , 52062 Aachen,

12. Hendrik Bluhm Aachen JARA-FIT Institute for Quantum Information

    RWTH Aachen University · Forschungszentrum Jülich · Jülich Aachen Research Alliance

    Affiliation as printed

    ARQUE Systems GmbH 4 , 52074 Aachen,

    JARA-FIT Institute for Quantum Information, Forschungszentrum Jülich GmbH and RWTH Aachen University 3 , 52062 Aachen,

13. Dominique Bougeard

    University of Regensburg

    Affiliation as printed

    Fakultät für Physik, Universität Regensburg 2 , Regensburg 93040,

14. Marvin Hartwig Zöllner

    Leibniz Institute for High Performance Microelectronics

    Affiliation as printed

    IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

15. Giovanni Capellini

    Roma Tre University · Leibniz Institute for High Performance Microelectronics

    Affiliation as printed

    Dipartimento di Scienze, Università Roma Tre 5 , Roma 00146,

    IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,

16. Felix Reichmann

    Leibniz Institute for High Performance Microelectronics

    Affiliation as printed

    IHP - Leibniz Institute for High Performance Microelectronics 1 , Frankfurt (Oder) 15236,