Enhanced Threshold Switching Devices Based on Conductive Filaments in SiOx Through Vertically Aligned MoS2 Layers

IEEE Electron Devices Technology & Manufacturing Conference (EDTM), pp. 1–3

Abstract

In this work, we investigate for the first time the resistive switching (RS) behavior in a bilayer stack of$\text{SiO}_{\mathrm{x}}$and vertically aligned$\text{MoS}_{2}\left(\text{VAMoS}_{2}\right)$. We demonstrate threshold switching by forming silver (Ag) conductive filaments (CFs) in an amorphous$\text{SiO}_{\mathrm{x}}$layer combined with$\text{VAMoS}_{2}$obtained through molybdenum (Mo) sulfurization. The$\text{SiO}_{\mathrm{x}} / \text{VAMoS}_{2}$devices exhibit repeatable RS with faster switching times and higher hold voltages compared to$\text{SiO}_{\mathrm{x}}$devices without$\text{VAMoS}_{2}$. The RS enhancement through$\text{VAMoS}_{2}$layers shows promise for compact vertical device architectures for emerging memories and neuromorphic computing applications.

Authors 8

1. Jimin Lee Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany

2. Sofía Cruces Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany

3. Dennis A. Braun Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany

4. Lukas Völkel Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany

5. Ke Ran Aachen AMO GmbH Advanced Microelectronic Center Aachen

   AMO (Germany)

   Affiliation as printed

   AMO GmbH,Advanced Microelectronic Center Aachen,Aachen,Germany

6. Joachim Mayer Aachen

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Central Facility for Electron Microscopy,Aachen,Germany

7. Alwin Daus Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany

8. Max C. Lemme Aachen Chair of Electronic Devices

   RWTH Aachen University

   Affiliation as printed

   RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany