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October 04, 2023 book-chapter Aachen paper

EUV Optics

RWTHedition, pp. 903–910

DOI: 10.1007/978-3-030-98323-9_43 OpenAlex

Authors 2

  1. Klaus Bergmann Aachen Fraunhofer ILT

    Fraunhofer Institute for Laser Technology

    Affiliation as printed

    Fraunhofer ILT, Aachen, Germany

  2. Jochen Vieker corresponding Aachen Fraunhofer ILT

    Fraunhofer Institute for Laser Technology

    Affiliation as printed

    Fraunhofer ILT, Aachen, Germany

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