October 11, 2007 article Extreme ultraviolet lithography: A review Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena DOI: 10.1116/1.2794048 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 404 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access EUV Optics 2023 RWTHedition book-chapter Engineering Advancements in Photolithography Techniques 0 citations 1 result References 0