March 01, 1978 article Magnetron sputtering: basic physics and application to cylindrical magnetrons Journal of Vacuum Science and Technology DOI: 10.1116/1.569448 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 371 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Coatings for Core–Shell Composite Micro‐Lattice Structures: Varying Sputtering Parameters 2021 Advanced Engineering Materials article Engineering Metal and Thin Film Mechanics 5 citations 1 result References 0