January 01, 2020 article Open access Solid-state qubits integrated with superconducting through-silicon vias DSpace@MIT (Massachusetts Institute of Technology) Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 2 stored of 97 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Highly-Conformal Sputtered Through-Silicon Vias With Sharp Superconducting Transition 2021 Journal of Microelectromechanical Systems article Engineering 3D IC and TSV technologies Open access cited by 2 patents 13 citations Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration 2020 IEEE Electron Device Letters article Engineering 3D IC and TSV technologies Open access cited by 2 patents 23 citations 2 results References 0