Angle-resolved STEM using an iris aperture: Scattering contributions and sources of error for the quantitative analysis in Si

Ultramicroscopy, vol. 221, pp. 113175

Authors 10

1. Tim Grieb corresponding

   University of Bremen

   Affiliation as printed

   Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany. Electronic address: grieb@ifp.uni-bremen.de

   Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany

2. Florian Fritz Krause

   University of Bremen

   Affiliation as printed

   Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany

3. Knut Müller‐Caspary Aachen II. Institute of Physics

   Forschungszentrum Jülich · Ernst Ruska Centre · RWTH Aachen University

   Affiliation as printed

   Ernst Ruska-Center for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Wilhelm-Johnen-Straße, Jülich 52425, Germany; RWTH Aachen University, II. Institute of Physics, Otto-Blumenthal-Straße, Aachen 52074, Germany

   Ernst Ruska-Center for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Wilhelm-Johnen-Straße, Jülich 52425, Germany

   RWTH Aachen University, II. Institute of Physics, Otto-Blumenthal-Straße, Aachen 52074, Germany

4. Saleh Firoozabadi

   Philipps University of Marburg

   Affiliation as printed

   Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg 35032, Germany

5. Christoph Mahr

   University of Bremen

   Affiliation as printed

   Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany

6. Marco Schowalter

   University of Bremen

   Affiliation as printed

   Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany

7. Andreas Beyer

   Philipps University of Marburg

   Affiliation as printed

   Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg 35032, Germany

8. Oliver Oppermann

   University of Bremen

   Affiliation as printed

   Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany

9. Kerstin Volz

   Philipps University of Marburg

   Affiliation as printed

   Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg 35032, Germany

10. Andreas Rosenauer

    University of Bremen

    Affiliation as printed

    Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen 28359, Germany