April 23, 2018 article Open access Promising Lithography Techniques for Next-Generation Logic Devices Nanomanufacturing and Metrology DOI: 10.1007/s41871-018-0016-9 Full text (OA) OpenAlex Authors 0 Author list not loaded yet. Cited by 3 stored of 160 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access AFM‐Based Hamaker Constant Determination with Blind Tip Reconstruction 2022 Advanced Materials Technologies article Physics and Astronomy Force Microscopy Techniques and Applications Open access 23 citations Rapid Prototyping of Organ-on-a-Chip Devices Using Maskless Photolithography 2021 Micromachines article Engineering Microfluidic and Capillary Electrophoresis Applications Open access cited by 1 patent 32 citations Key Role of Very Low Energy Electrons in Tin-Based Molecular Resists for Extreme Ultraviolet Nanolithography 2020 ACS Applied Materials & Interfaces article Engineering Advancements in Photolithography Techniques Open access cited by 21 patents 113 citations 3 results References 0