November 10, 2008 article Reflectivity degradation of grazing-incident EUV mirrors by EUV exposure and carbon contamination Microelectronic Engineering DOI: 10.1016/j.mee.2008.10.009 OpenAlex Authors 0 Author list not loaded yet. Cited by 1 stored of 21 Search Sort Most cited Newest Oldest Patent citations Title Any typearticle review book-chapter conference-paper preprint dissertation book dataset other Any fieldAgricultural and Biological Sciences Arts and Humanities Biochemistry, Genetics and Molecular Biology Business, Management and Accounting Chemical Engineering Chemistry Computer Science Decision Sciences Dentistry Earth and Planetary Sciences Economics, Econometrics and Finance Energy Engineering Environmental Science Health Professions Immunology and Microbiology Materials Science Mathematics Medicine Neuroscience Nursing Pharmacology, Toxicology and Pharmaceutics Physics and Astronomy Psychology Social Sciences Veterinary Open access Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings 2020 conference-paper Engineering Advancements in Photolithography Techniques 5 citations 1 result References 0